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@article{898871, author = {Dvořák, Pavel and Vašina, Petr}, article_number = {5}, keywords = {plasma; higher harmonic frequencies; reactive magnetron sputtering}, language = {eng}, issn = {0963-0252}, journal = {Plasma Sources Sci. Technol.}, title = {Monitoring of magnetron target poisoning by measurement of higher harmonics of discharge voltages}, volume = {19}, year = {2010} }
TY - JOUR ID - 898871 AU - Dvořák, Pavel - Vašina, Petr PY - 2010 TI - Monitoring of magnetron target poisoning by measurement of higher harmonics of discharge voltages JF - Plasma Sources Sci. Technol. VL - 19 IS - 5 SP - 055016 EP - 055016 PB - IOP Publishing SN - 09630252 KW - plasma KW - higher harmonic frequencies KW - reactive magnetron sputtering N2 - A promising method for monitoring of reactive magnetron sputtering, based on the measurement of amplitudes of higher harmonic frequencies of discharge voltages, is proposed. The measurement of the amplitudes can be performed either by an uncompensated probe in the plasma or on the cable between the RF generator and the sputtered target. The sensitivity of the proposed method is significantly better than measurement of other electrical quantities conventionally used for process control. Physical reasons for the change of amplitudes of higher harmonic frequencies during the mode transition were found. The paper shows that the observed changes in amplitudes of higher harmonics by the transition are not caused either by the pressure change, or by the changes in the composition of the gas in the reactor volume. It was found that the amplitudes of higher harmonics reflect primarily the state of the magnetron target poisoning. ER -
DVOŘÁK, Pavel and Petr VAŠINA. Monitoring of magnetron target poisoning by measurement of higher harmonics of discharge voltages. \textit{Plasma Sources Sci. Technol.}. IOP Publishing, 2010, vol.~19, No~5, p.~055016-55023. ISSN~0963-0252.
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