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@inproceedings{903479,
author = {Skácelová, Dana and Sťahel, Pavel and Haničinec, Martin and Černák, Mirko},
address = {Bratislava},
booktitle = {HAKONE XII Contributed paper},
keywords = {Diffuse coplanar DBD, silicon, plasma treatment},
language = {eng},
location = {Bratislava},
isbn = {978-80-89186-71-6},
publisher = {Comenius University},
title = {Investigation of silicon surface wettability after plasma treatment},
year = {2010}
}
TY - JOUR
ID - 903479
AU - Skácelová, Dana - Sťahel, Pavel - Haničinec, Martin - Černák, Mirko
PY - 2010
TI - Investigation of silicon surface wettability after plasma treatment
PB - Comenius University
CY - Bratislava
SN - 9788089186716
KW - Diffuse coplanar DBD, silicon, plasma treatment
N2 - In this contribution the influence of the plasma on crystalline Si (100) surface was studied. Dielectric barrier discharge the so called Diffuse Coplanar Surface Barrier Discharge (DCSBD) to plasma modification was used. The silicon surface modification after plasma treatment was investigated by AFM and contact angle measurement. Different way to clean the surface is reflected on the surface wettability after plasma treatment and the ageing effect of treated surface was studied too.
ER -
SKÁCELOVÁ, Dana, Pavel SŤAHEL, Martin HANIČINEC a Mirko ČERNÁK. Investigation of silicon surface wettability after plasma treatment. In \textit{HAKONE XII Contributed paper}. Bratislava: Comenius University, 2010, 307 s. ISBN~978-80-89186-71-6.
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