Other formats:
BibTeX
LaTeX
RIS
@inproceedings{903479, author = {Skácelová, Dana and Sťahel, Pavel and Haničinec, Martin and Černák, Mirko}, address = {Bratislava}, booktitle = {HAKONE XII Contributed paper}, keywords = {Diffuse coplanar DBD, silicon, plasma treatment}, language = {eng}, location = {Bratislava}, isbn = {978-80-89186-71-6}, publisher = {Comenius University}, title = {Investigation of silicon surface wettability after plasma treatment}, year = {2010} }
TY - JOUR ID - 903479 AU - Skácelová, Dana - Sťahel, Pavel - Haničinec, Martin - Černák, Mirko PY - 2010 TI - Investigation of silicon surface wettability after plasma treatment PB - Comenius University CY - Bratislava SN - 9788089186716 KW - Diffuse coplanar DBD, silicon, plasma treatment N2 - In this contribution the influence of the plasma on crystalline Si (100) surface was studied. Dielectric barrier discharge the so called Diffuse Coplanar Surface Barrier Discharge (DCSBD) to plasma modification was used. The silicon surface modification after plasma treatment was investigated by AFM and contact angle measurement. Different way to clean the surface is reflected on the surface wettability after plasma treatment and the ageing effect of treated surface was studied too. ER -
SKÁCELOVÁ, Dana, Pavel SŤAHEL, Martin HANIČINEC and Mirko ČERNÁK. Investigation of silicon surface wettability after plasma treatment. In \textit{HAKONE XII Contributed paper}. Bratislava: Comenius University, 2010, 307 pp. ISBN~978-80-89186-71-6.
|