D 2010

Investigation of silicon surface wettability after plasma treatment

SKÁCELOVÁ, Dana, Pavel SŤAHEL, Martin HANIČINEC and Mirko ČERNÁK

Basic information

Original name

Investigation of silicon surface wettability after plasma treatment

Authors

SKÁCELOVÁ, Dana, Pavel SŤAHEL, Martin HANIČINEC and Mirko ČERNÁK

Edition

Bratislava, HAKONE XII Contributed paper, 307 pp. 2010

Publisher

Comenius University

Other information

Language

English

Type of outcome

Stať ve sborníku

Field of Study

10305 Fluids and plasma physics

Country of publisher

Slovakia

Confidentiality degree

není předmětem státního či obchodního tajemství

Organization unit

Faculty of Science

ISBN

978-80-89186-71-6

Keywords in English

Diffuse coplanar DBD, silicon, plasma treatment
Změněno: 5/4/2012 16:39, Mgr. Dana Skácelová, Ph.D.

Abstract

V originále

In this contribution the influence of the plasma on crystalline Si (100) surface was studied. Dielectric barrier discharge the so called Diffuse Coplanar Surface Barrier Discharge (DCSBD) to plasma modification was used. The silicon surface modification after plasma treatment was investigated by AFM and contact angle measurement. Different way to clean the surface is reflected on the surface wettability after plasma treatment and the ageing effect of treated surface was studied too.

Links

KAN101630651, research and development project
Name: Tvorba nano-vrstev a nano-povlaků na textiliích s využitím plazmových povrchových úprav za atmosférického tlaku
Investor: Academy of Sciences of the Czech Republic, Preparation of nano-films and nano-coatings on textiles using plasma surface treatment at atmospheric pressure
MSM0021622411, plan (intention)
Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface