Deposition and characterization of n-TiC/a-C:H coatings prepared by hybrid PVD-PECVD
| SOUČEK, Pavel, El Mel ABDELAZIZ, Tessier PIERRE-YVES, Marek ELIÁŠ, Vilma BURŠÍKOVÁ and Petr VAŠINA. Deposition and characterization of n-TiC/a-C:H coatings prepared by hybrid PVD-PECVD. In Twelfth International Conference on Plasma Surface Engineering. 2010. |
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| Basic information | |
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| Original name | Deposition and characterization of n-TiC/a-C:H coatings prepared by hybrid PVD-PECVD |
| Authors | SOUČEK, Pavel (203 Czech Republic, belonging to the institution), El Mel ABDELAZIZ (250 France), Tessier PIERRE-YVES (250 France), Marek ELIÁŠ (203 Czech Republic, belonging to the institution), Vilma BURŠÍKOVÁ (203 Czech Republic, belonging to the institution) and Petr VAŠINA (203 Czech Republic, guarantor, belonging to the institution). |
| Edition | Twelfth International Conference on Plasma Surface Engineering, 2010. |
| Other information | |
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| Original language | English |
| Type of outcome | Conference abstract |
| Field of Study | 10305 Fluids and plasma physics |
| Country of publisher | Germany |
| Confidentiality degree | is not subject to a state or trade secret |
| RIV identification code | RIV/00216224:14310/10:00045787 |
| Organization unit | Faculty of Science |
| Keywords (in Czech) | nanokompozit; titan; uhlík; naprašování |
| Keywords in English | nanocomposite; titanium; carbon; sputtering |
| Changed by | Changed by: doc. Mgr. Pavel Souček, Ph.D., učo 175085. Changed: 3/1/2011 10:56. |
| Abstract |
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| Deposition and characterization of n-TiC/a-C:H coatings prepared by hybrid PVD-PECVD. Analyses of mechanical properties, chemical composition and adhesion. |
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| GP202/08/P038, research and development project | Name: Studium chování hybridního depozičního procesu a jeho využití pro přípravu tenkých vrstev |
| Investor: Czech Science Foundation, Study of hybrid deposition process and its application for thin film deposition | |
| MSM0021622411, plan (intention) | Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek |
| Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface | |
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