Hybrid PVD-PECVD process: focusing on modelling and steady-state conditions
| SCHMIDTOVÁ, Tereza, Petr VAŠINA and Pavel SOUČEK. Hybrid PVD-PECVD process: focusing on modelling and steady-state conditions. In Potential and Applications of Surface Nanotreatment of Polymers and Glass. 2010. |
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| Basic information | |
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| Original name | Hybrid PVD-PECVD process: focusing on modelling and steady-state conditions |
| Authors | SCHMIDTOVÁ, Tereza (203 Czech Republic, belonging to the institution), Petr VAŠINA (203 Czech Republic, guarantor, belonging to the institution) and Pavel SOUČEK (203 Czech Republic, belonging to the institution). |
| Edition | Potential and Applications of Surface Nanotreatment of Polymers and Glass, 2010. |
| Other information | |
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| Original language | English |
| Type of outcome | Conference abstract |
| Field of Study | 10305 Fluids and plasma physics |
| Country of publisher | Czech Republic |
| Confidentiality degree | is not subject to a state or trade secret |
| RIV identification code | RIV/00216224:14310/10:00045790 |
| Organization unit | Faculty of Science |
| Keywords (in Czech) | magnetronové naprašování; modelování |
| Keywords in English | magnetron sputtering; modelling |
| Changed by | Changed by: Mgr. Tereza Schmidtová, Ph.D., učo 151253. Changed: 4/1/2011 09:34. |
| Abstract |
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| Hybrid PVD-PECVD process: focusing on modelling and steady-state conditions. No hysteresis effect was observed and modelled. |
| Links | |
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| GD104/09/H080, research and development project | Name: Plazmochemické procesy a jejich technologické aplikace |
| Investor: Czech Science Foundation | |
| GP202/08/P038, research and development project | Name: Studium chování hybridního depozičního procesu a jeho využití pro přípravu tenkých vrstev |
| Investor: Czech Science Foundation, Study of hybrid deposition process and its application for thin film deposition | |
| MSM0021622411, plan (intention) | Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek |
| Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface | |
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