JAŠEK, Ondřej, Petr SYNEK, Lenka ZAJÍČKOVÁ, Marek ELIÁŠ and Vít KUDRLE. SYNTHESIS OF CARBON NANOSTRUCTURES BY PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITION AT ATMOSPHERIC PRESSURE. Journal of Electrical Engineering. Bratislava: Slovak University of Technology, 2010, vol. 61, No 5, p. 311-313. ISSN 1335-3632. |
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@article{913031, author = {Jašek, Ondřej and Synek, Petr and Zajíčková, Lenka and Eliáš, Marek and Kudrle, Vít}, article_location = {Bratislava}, article_number = {5}, keywords = {carbon nanostructures; plasma enhanced chemical vapour deposition; atmospheric pressure}, language = {eng}, issn = {1335-3632}, journal = {Journal of Electrical Engineering}, title = {SYNTHESIS OF CARBON NANOSTRUCTURES BY PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITION AT ATMOSPHERIC PRESSURE}, url = {http://iris.elf.stuba.sk/cgi-bin/jeeec?act=pr&no=5_110}, volume = {61}, year = {2010} }
TY - JOUR ID - 913031 AU - Jašek, Ondřej - Synek, Petr - Zajíčková, Lenka - Eliáš, Marek - Kudrle, Vít PY - 2010 TI - SYNTHESIS OF CARBON NANOSTRUCTURES BY PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITION AT ATMOSPHERIC PRESSURE JF - Journal of Electrical Engineering VL - 61 IS - 5 SP - 311-313 EP - 311-313 PB - Slovak University of Technology SN - 13353632 KW - carbon nanostructures KW - plasma enhanced chemical vapour deposition KW - atmospheric pressure UR - http://iris.elf.stuba.sk/cgi-bin/jeeec?act=pr&no=5_110 L2 - http://iris.elf.stuba.sk/cgi-bin/jeeec?act=pr&no=5_110 N2 - Carbon nanostructures present the leading field in nanotechnology research. A wide range of chemical and physical methods was used for carbon nanostructures synthesis including arc discharges, laser ablation and chemical vapour deposition. Plasma enhanced chemical vapour deposition (PECVD) with its application in modern microelectronics industry became soon target of research in carbon nanostructures synthesis. Selection of the ideal growth process depends on the application. Most of PECVD techniques work at low pressure requiring vacuum systems. However for industrial applications it would be desirable to work at atmospheric pressure. In this article carbon nanostructures synthesis by plasma discharges working at atmospheric pressure will be reviewed. ER -
JAŠEK, Ondřej, Petr SYNEK, Lenka ZAJÍČKOVÁ, Marek ELIÁŠ and Vít KUDRLE. SYNTHESIS OF CARBON NANOSTRUCTURES BY PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITION AT ATMOSPHERIC PRESSURE. \textit{Journal of Electrical Engineering}. Bratislava: Slovak University of Technology, 2010, vol.~61, No~5, p.~311-313. ISSN~1335-3632.
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