| JAŠEK, Ondřej, Petr SYNEK, Lenka ZAJÍČKOVÁ, Marek ELIÁŠ and Vít KUDRLE. SYNTHESIS OF CARBON NANOSTRUCTURES BY PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITION AT ATMOSPHERIC PRESSURE. Journal of Electrical Engineering. Bratislava: Slovak University of Technology, 2010, vol. 61, No 5, p. 311-313. ISSN 1335-3632. |
Other formats:
BibTeX
LaTeX
RIS
@article{913031,
author = {Jašek, Ondřej and Synek, Petr and Zajíčková, Lenka and Eliáš, Marek and Kudrle, Vít},
article_location = {Bratislava},
article_number = {5},
keywords = {carbon nanostructures; plasma enhanced chemical vapour deposition; atmospheric pressure},
language = {eng},
issn = {1335-3632},
journal = {Journal of Electrical Engineering},
title = {SYNTHESIS OF CARBON NANOSTRUCTURES BY PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITION AT ATMOSPHERIC PRESSURE},
url = {http://iris.elf.stuba.sk/cgi-bin/jeeec?act=pr&no=5_110},
volume = {61},
year = {2010}
}
TY - JOUR
ID - 913031
AU - Jašek, Ondřej - Synek, Petr - Zajíčková, Lenka - Eliáš, Marek - Kudrle, Vít
PY - 2010
TI - SYNTHESIS OF CARBON NANOSTRUCTURES BY PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITION AT ATMOSPHERIC PRESSURE
JF - Journal of Electrical Engineering
VL - 61
IS - 5
SP - 311-313
EP - 311-313
PB - Slovak University of Technology
SN - 13353632
KW - carbon nanostructures
KW - plasma enhanced chemical vapour deposition
KW - atmospheric pressure
UR - http://iris.elf.stuba.sk/cgi-bin/jeeec?act=pr&no=5_110
L2 - http://iris.elf.stuba.sk/cgi-bin/jeeec?act=pr&no=5_110
N2 - Carbon nanostructures present the leading field in nanotechnology research. A wide range of chemical and physical methods was used for carbon nanostructures synthesis including arc discharges, laser ablation and chemical vapour deposition. Plasma enhanced chemical vapour deposition (PECVD) with its application in modern microelectronics industry became soon target of research in carbon nanostructures synthesis. Selection of the ideal growth process depends on the application. Most of PECVD techniques work at low pressure requiring vacuum systems. However for industrial applications it would be desirable to work at atmospheric pressure. In this article carbon nanostructures synthesis by plasma discharges working at atmospheric pressure will be reviewed.
ER -
JAŠEK, Ondřej, Petr SYNEK, Lenka ZAJÍČKOVÁ, Marek ELIÁŠ and Vít KUDRLE. SYNTHESIS OF CARBON NANOSTRUCTURES BY PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITION AT ATMOSPHERIC PRESSURE. \textit{Journal of Electrical Engineering}. Bratislava: Slovak University of Technology, 2010, vol.~61, No~5, p.~311-313. ISSN~1335-3632.
|
