| CAHA, Ondřej, Mojmír MEDUŇA, Silvie BERNATOVÁ, Jiří RŮŽIČKA, Petr MIKULÍK, Jiří BURŠÍK, Milan SVOBODA a S. BERNSTORFF. X-ray scattering study of oxide precipitates in Cz-Si. ISBN 978-80-254-7361-0. 2010. |
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@proceedings{918400,
author = {Caha, Ondřej and Meduňa, Mojmír and Bernatová, Silvie and Růžička, Jiří and Mikulík, Petr and Buršík, Jiří and Svoboda, Milan and Bernstorff, S.},
keywords = {x-ray; silicon; defects},
language = {eng},
isbn = {978-80-254-7361-0},
title = {X-ray scattering study of oxide precipitates in Cz-Si},
year = {2010}
}
TY - CONF
ID - 918400
AU - Caha, Ondřej - Meduňa, Mojmír - Bernatová, Silvie - Růžička, Jiří - Mikulík, Petr - Buršík, Jiří - Svoboda, Milan - Bernstorff, S.
PY - 2010
TI - X-ray scattering study of oxide precipitates in Cz-Si
SN - 9788025473610
KW - x-ray
KW - silicon
KW - defects
N2 - Two x-ray diffraction methods were used for characterization of the oxide precipitates in Czochralski silicon series of samples. The maping of the diffuse scattering around reciprocal lattice point in Bragg geometry and the simultaneous measurement of the diffracted and transmitted beam intensity in the Laue diffraction geometry.
ER -
CAHA, Ondřej, Mojmír MEDUŇA, Silvie BERNATOVÁ, Jiří RŮŽIČKA, Petr MIKULÍK, Jiří BURŠÍK, Milan SVOBODA a S. BERNSTORFF. \textit{X-ray scattering study of oxide precipitates in Cz-Si}. ISBN~978-80-254-7361-0. 2010.
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