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@proceedings{918551,
author = {Stoica, Adrian and Mocanu, Valentin and Kadlečíková, Magdaléna and Peřina, Vratislav and Klapetek, Petr and Franta, Daniel and Nečas, David and Slavíček, Pavel and Buršíková, Vilma},
booktitle = {E-MRS 2010 Spring Meeting Book of Abstracts},
keywords = {PECVD; diamond-like carbon; deuterated layer; hydrogen; mechanical characterization; thin layer},
language = {eng},
title = {Comparative study on hydrogenated and deuterated amorphous carbon films deposited by RF PECVD},
url = {http://www.emrs-strasbourg.com/files/USB%2010/symposium_l.pdf},
year = {2010}
}
TY - CONF
ID - 918551
AU - Stoica, Adrian - Mocanu, Valentin - Kadlečíková, Magdaléna - Peřina, Vratislav - Klapetek, Petr - Franta, Daniel - Nečas, David - Slavíček, Pavel - Buršíková, Vilma
PY - 2010
TI - Comparative study on hydrogenated and deuterated amorphous carbon films deposited by RF PECVD
KW - PECVD
KW - diamond-like carbon
KW - deuterated layer
KW - hydrogen
KW - mechanical characterization
KW - thin layer
UR - http://www.emrs-strasbourg.com/files/USB%2010/symposium_l.pdf
N2 - The aim of this work is to characterize and compare the properties of hydrogenated carbon thin films (HDLC) and deuterated carbon thin films (DDLC) deposited by r.f. plasma enhanced chemical vapor deposition (PECVD) from two different precursor mixtures methane/hydrogen (CH4/H2) and methane/deuterium (CH4/D2) on single crystalline silicon, glass and polycarbonate substrates. The experiments were performed at the same deposition parameters, changing only the precursor gas mixtures. The characterization of the thin films surface was done by contact angle measurements and surface energy calculation. The mechanical tests were performed mainly using depth sensing indentation method. We focused our attention on the following coating properties: hardness, elastic modulus, fracture toughness, film-substrate adhesion and internal stress. Moreover, we studied the effect of the internal stress on the indentation response of the film-substrate systems. The results were completed by advanced plasma diagnostics performed by means of optical emission spectroscopy (OES).
ER -
STOICA, Adrian, Valentin MOCANU, Magdaléna KADLEČÍKOVÁ, Vratislav PEŘINA, Petr KLAPETEK, Daniel FRANTA, David NEČAS, Pavel SLAVÍČEK a Vilma BURŠÍKOVÁ. Comparative study on hydrogenated and deuterated amorphous carbon films deposited by RF PECVD. In \textit{E-MRS 2010 Spring Meeting Book of Abstracts}. 2010.
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