a 2010

OPTICAL PROPERTIES OF PECVD DEPOSITED DLC:N FILMS

MURESAN, Mihai George, Lenka ZAJÍČKOVÁ, Daniel FRANTA and David NEČAS

Basic information

Original name

OPTICAL PROPERTIES OF PECVD DEPOSITED DLC:N FILMS

Authors

MURESAN, Mihai George (642 Romania, guarantor, belonging to the institution), Lenka ZAJÍČKOVÁ (203 Czech Republic, belonging to the institution), Daniel FRANTA (203 Czech Republic, belonging to the institution) and David NEČAS (203 Czech Republic, belonging to the institution)

Edition

11th International Balkan Workshop on Applied Physics 2010, 2010

Other information

Language

English

Type of outcome

Konferenční abstrakt

Field of Study

10305 Fluids and plasma physics

Country of publisher

Romania

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

RIV identification code

RIV/00216224:14310/10:00047524

Organization unit

Faculty of Science

ISBN

978-973-614-554-4

Keywords in English

diamond-like carbon; nitrogen; pecvd; optical properties

Tags

Změněno: 14/3/2011 18:54, Mihai George Muresan, Ph.D., M.Sc.

Abstract

V originále

Amorphous hydrogenated carbon films can be used, besides tribological applications, in photonics. It can include such applications like antireflective coatings, photosensitive materials or thickness monitoring. The optical properties are crucial parameters for these applications, especially possible tuning of refractive index and decrease of absorption in visible. These effects can be achieved by doping with nitrogen. In this contribution, nitrogen doped diamond-like carbon films (DLC:N) were deposited on silicon substrates by plasma enhanced chemical vapor deposition (PECVD) method using a mixture of methane, hydrogen and nitrogen as reactants. Discharge was excited in capacitively coupled configuration at 13.56 MHz. The bias voltage, working pressure and temperature were changed to vary film optical properties. The optical properties of the films were investigated using UV-VIS reflectometry, ellipsometry and FTIR transmittance measurement.

Links

GD104/09/H080, research and development project
Name: Plazmochemické procesy a jejich technologické aplikace
Investor: Czech Science Foundation
MSM0021622411, plan (intention)
Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface