PREPARATION AND CHARACTERIZATION OF DLC:N FILMS

MURESAN, Mihai George, Lenka ZAJÍČKOVÁ, Vilma BURŠÍKOVÁ, Daniel FRANTA and David NEČAS. PREPARATION AND CHARACTERIZATION OF DLC:N FILMS. In TANGER Ltd. 2nd International Conference Nanocon 2010. 1st. Olomouc: TANGER Ltd., 2010, p. 434-440. ISBN 978-80-87294-19-2.

Basic information

• Original name: PREPARATION AND CHARACTERIZATION OF DLC:N FILMS
• Authors: MURESAN, Mihai George (642 Romania, guarantor, belonging to the institution), Lenka ZAJÍČKOVÁ (203 Czech Republic, belonging to the institution), Vilma BURŠÍKOVÁ (203 Czech Republic, belonging to the institution), Daniel FRANTA (203 Czech Republic, belonging to the institution) and David NEČAS (203 Czech Republic, belonging to the institution).
• Edition: 1st. Olomouc, 2nd International Conference Nanocon 2010, p. 434-440, 7 pp. 2010.
• Publisher: TANGER Ltd.

Other information

• Original language: English
• Type of outcome: Proceedings paper
• Field of Study: 10305 Fluids and plasma physics
• Country of publisher: Czech Republic
• Confidentiality degree: is not subject to a state or trade secret
• RIV identification code: RIV/00216224:14310/10:00049718
• Organization unit: Faculty of Science
• ISBN: 978-80-87294-19-2
• UT WoS: 000286656400077
• Keywords in English: Diamond-Like Carbon; PECVD
• Tags: AKb, rivok

Abstract

Diamond-like carbon (DLC) exhibits useful properties such as wide band gaps, high thermal conductivities, high hardness and low friction coefficient. Technical difficulties due to inherent internal stress in preparation of DLC films on metallic substrates are the cause of it's poor adhesion. Nitrogen doped diamond-like carbon (DLC:N) films were deposited by plasma enhanced chemical vapuor deposition (PECVD) using capacitively coupled rf discharge at 13.56 MHz in the mixture of methane, hydrogen and nitrogen on silicon, glass and metallic substrates (stainless steel). Gas mixture, bias and discharge frequency were changed to modify the parameters of the deposited films. The optical properties of the deposited films were investigated by: reflectometry, ellipsometry and FTIR transmittance measurement. Depth sensing indentation technique was used to determine hardness and elastic modulus. To improve adhesion on metallic substrates and create a hard film, they were optimised in order to improve adhesion, by the preparation of multilayer-structures with different deposition conditions.

Links

• GA202/07/1669, research and development project: Name: Depozice termomechanicky stabilních nanostrukturovaných diamantu-podobných tenkých vrstev ve dvojfrekvenčních kapacitních výbojích

Investor: Czech Science Foundation, Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges

• GD104/09/H080, research and development project: Name: Plazmochemické procesy a jejich technologické aplikace

Investor: Czech Science Foundation

• MSM0021622411, plan (intention): Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface