a 2010

Effect of Nitrogen Incorporation on Optical Properties of DLC Layers

MURESAN, Mihai George, Lenka ZAJÍČKOVÁ, Daniel FRANTA and David NEČAS

Basic information

Original name

Effect of Nitrogen Incorporation on Optical Properties of DLC Layers

Authors

MURESAN, Mihai George (642 Romania, guarantor, belonging to the institution), Lenka ZAJÍČKOVÁ (203 Czech Republic, belonging to the institution), Daniel FRANTA (203 Czech Republic, belonging to the institution) and David NEČAS (203 Czech Republic, belonging to the institution)

Edition

19th Annual Student Conference - Week of Doctoral Students 2010, 2010

Other information

Language

English

Type of outcome

Konferenční abstrakt

Field of Study

10305 Fluids and plasma physics

Country of publisher

Czech Republic

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

RIV identification code

RIV/00216224:14310/10:00047539

Organization unit

Faculty of Science

Keywords in English

Diamond-Like Carbon; optical properties
Změněno: 14/3/2011 19:08, Mihai George Muresan, Ph.D., M.Sc.

Abstract

V originále

Diamond-like carbon (amorphous hydrogenated carbon: a-C:H) films doped with different amount of nitrogen were deposited by plasma enhanced chemical vapor deposition (PECVD) using capacitively coupled rf discharge 13.56 in the mixture of CH4/H2/N2 on silicon substrates. Nitrogen content allowed reduction of the inherent internal stress of the DLC layer. DC self-bias, time and gas feed composition parameters were used for modification of the optical properties, adhesion to substrates, chemical composition and structure of the deposited films.

Links

GD104/09/H080, research and development project
Name: Plazmochemické procesy a jejich technologické aplikace
Investor: Czech Science Foundation
MSM0021622411, plan (intention)
Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface