Effect of Nitrogen Incorporation on Optical Properties of DLC Layers

MURESAN, Mihai George, Lenka ZAJÍČKOVÁ, Daniel FRANTA and David NEČAS. Effect of Nitrogen Incorporation on Optical Properties of DLC Layers. In 19th Annual Student Conference - Week of Doctoral Students 2010. 2010.

Basic information

• Original name: Effect of Nitrogen Incorporation on Optical Properties of DLC Layers
• Authors: MURESAN, Mihai George (642 Romania, guarantor, belonging to the institution), Lenka ZAJÍČKOVÁ (203 Czech Republic, belonging to the institution), Daniel FRANTA (203 Czech Republic, belonging to the institution) and David NEČAS (203 Czech Republic, belonging to the institution).
• Edition: 19th Annual Student Conference - Week of Doctoral Students 2010, 2010.

Other information

• Original language: English
• Type of outcome: Conference abstract
• Field of Study: 10305 Fluids and plasma physics
• Country of publisher: Czech Republic
• Confidentiality degree: is not subject to a state or trade secret
• WWW: URL
• RIV identification code: RIV/00216224:14310/10:00047539
• Organization unit: Faculty of Science
• Keywords in English: Diamond-Like Carbon; optical properties

Abstract

Diamond-like carbon (amorphous hydrogenated carbon: a-C:H) films doped with different amount of nitrogen were deposited by plasma enhanced chemical vapor deposition (PECVD) using capacitively coupled rf discharge 13.56 in the mixture of CH4/H2/N2 on silicon substrates. Nitrogen content allowed reduction of the inherent internal stress of the DLC layer. DC self-bias, time and gas feed composition parameters were used for modification of the optical properties, adhesion to substrates, chemical composition and structure of the deposited films.

Links

• GD104/09/H080, research and development project: Name: Plazmochemické procesy a jejich technologické aplikace

Investor: Czech Science Foundation

• MSM0021622411, plan (intention): Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface