Effect of nitrogen incorporation on mechanical properties of DLC coatings on metallic substrates

MURESAN, Mihai George, Lenka ZAJÍČKOVÁ, Vilma BURŠÍKOVÁ, Daniel FRANTA, David NEČAS and Vratislav PEŘINA. Effect of nitrogen incorporation on mechanical properties of DLC coatings on metallic substrates. In Material Science and Engineering. 2010.

Basic information

• Original name: Effect of nitrogen incorporation on mechanical properties of DLC coatings on metallic substrates
• Authors: MURESAN, Mihai George (642 Romania, guarantor, belonging to the institution), Lenka ZAJÍČKOVÁ (203 Czech Republic, belonging to the institution), Vilma BURŠÍKOVÁ (203 Czech Republic, belonging to the institution), Daniel FRANTA (203 Czech Republic, belonging to the institution), David NEČAS (203 Czech Republic, belonging to the institution) and Vratislav PEŘINA (203 Czech Republic, belonging to the institution).
• Edition: Material Science and Engineering, 2010.

Other information

• Original language: English
• Type of outcome: Conference abstract
• Field of Study: 10305 Fluids and plasma physics
• Country of publisher: Germany
• Confidentiality degree: is not subject to a state or trade secret
• WWW: URL
• RIV identification code: RIV/00216224:14310/10:00047540
• Organization unit: Faculty of Science
• Keywords in English: DLC; metallic substrate; adhesion

Abstract

Diamond-like carbon (DLC) and hydrogenated amorphous carbon (a-C:H) films has grown enormously due to their particular and useful properties such as their wide band gaps, high thermal conductivities, high hardness and low friction coefficient. However, there are some technical difficulties in their preparation especially on metallic substrates, where the adhesion is poor. Diamond-like carbon (amorphous hydrogenated carbon: a-C:H) films doped with different amount of nitrogen were deposited by plasma enhanced chemical vapor deposition (PECVD) using capacitively coupled rf discharge (13.56 or 27.12 MHz) in the mixture of CH4/H2/N2 on silicon, glass and metallic substrates. The pressure was maintained below 20 Pa. DC self-bias and gas feed composition parameters were used for modification of the mechanical properties, adhesion to different substrates, chemical composition and structure of the deposited films. Nitrogen content allowed deposition of hard films also on metallic substrates such as stainless steel and aluminum, which are known for poor adhesion on pure DLC films. Mechanical properties of the deposited films were investigated by depth sensing indentation technique. Their structure was studied by optical methods in spectral range from UV to IR. Chemical composition was determined by Rutherford Backscattering Spectroscopy (RBS) combined with Elastic Recoil Detection Analysis (ERDA). From these we could evaluate the percentage of hydrogen from the deposited films. Adhesion to these substrates and mechanical properties of the coatings was optimized by the preparation of multilayer-structures involving TiN and different a-C:H:N films. Acknowledgement: This research has been supported by Ministry of Education, under project MSM 0021622411, Grant agency GACR No. 104/09/H080 and GACR No. 202/07/1669.

Links

• GA202/07/1669, research and development project: Name: Depozice termomechanicky stabilních nanostrukturovaných diamantu-podobných tenkých vrstev ve dvojfrekvenčních kapacitních výbojích

Investor: Czech Science Foundation, Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges

• GD104/09/H080, research and development project: Name: Plazmochemické procesy a jejich technologické aplikace

Investor: Czech Science Foundation

• MSM0021622411, plan (intention): Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface