Diamond-Like Carbon film for protective use on glass and polymer surfaces

MURESAN, Mihai George, Lenka ZAJÍČKOVÁ, Daniel FRANTA and David NEČAS. Diamond-Like Carbon film for protective use on glass and polymer surfaces. In Potential and applications of surface nanotreatment of polymers and glass. 2010.

Basic information

• Original name: Diamond-Like Carbon film for protective use on glass and polymer surfaces
• Authors: MURESAN, Mihai George (642 Romania, guarantor, belonging to the institution), Lenka ZAJÍČKOVÁ (203 Czech Republic, belonging to the institution), Daniel FRANTA (203 Czech Republic, belonging to the institution) and David NEČAS (203 Czech Republic, belonging to the institution).
• Edition: Potential and applications of surface nanotreatment of polymers and glass, 2010.

Other information

• Original language: English
• Type of outcome: Conference abstract
• Field of Study: 10305 Fluids and plasma physics
• Country of publisher: Czech Republic
• Confidentiality degree: is not subject to a state or trade secret
• WWW: URL
• RIV identification code: RIV/00216224:14310/10:00047541
• Organization unit: Faculty of Science
• Keywords in English: DLC; pecvd; glass; polymers; hardness

Abstract

Amorphous hydrogenated carbon films can be used, besides tribological applications for optical applications. It can include antireflective coatings, photosensitive materials, scratch resistant glass and polymer surfaces. The optical properties are crucial parameters for these applications, especially possible tuning of refractive index and decrease of absorption in visible. Diamond-like carbon (amorphous hydrogenated carbon: a-C:H) films were deposited by plasma enhanced chemical vapor deposition (PECVD) using capacitively coupled rf discharge at 13.56 MHz in the mixture of methane and hydrogen on silicon and glass substrates. DC self-bias, time and gas feed composition parameters were used for modification of the optical properties, adhesion to substrates, chemical composition and structure of the deposited films. . The optical properties of the films were investigated using UV-VIS reflectometry and ellipsometry. Mechanical tests, in form of depth sensing indentation, were also performed. Acknowledgement: This research has been supported by Ministry of Education, under project MSM 0021622411, grant agency GACR No. 104/09/H080

Links

• GD104/09/H080, research and development project: Name: Plazmochemické procesy a jejich technologické aplikace

Investor: Czech Science Foundation

• MSM0021622411, plan (intention): Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface