STOICA, Adrian, Rodica VLADOIU, Geavit MUSA, Victor CIUPINA, Mirela CONTULOV, Vilma BURŠÍKOVÁ and Olga BLÁHOVÁ. Mechanical properties of thin films deposited by TVA and G-TVA methods. Chemicke Listy. Praha: Asociace českých chemických společností, 2011, 105/2011, No 14, p. 132-135. ISSN 0009-2770. |
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@article{935652, author = {Stoica, Adrian and Vladoiu, Rodica and Musa, Geavit and Ciupina, Victor and Contulov, Mirela and Buršíková, Vilma and Bláhová, Olga}, article_location = {Praha}, article_number = {14}, keywords = {Thermionic Vacuum Arc; Gaseous Thermionic Vacuum Arc; DLC coatings; nanoindentation}, language = {eng}, issn = {0009-2770}, journal = {Chemicke Listy}, title = {Mechanical properties of thin films deposited by TVA and G-TVA methods}, url = {http://www.chemicke-listy.cz/common/article-vol_105-issue_14-page_s132.html}, volume = {105/2011}, year = {2011} }
TY - JOUR ID - 935652 AU - Stoica, Adrian - Vladoiu, Rodica - Musa, Geavit - Ciupina, Victor - Contulov, Mirela - Buršíková, Vilma - Bláhová, Olga PY - 2011 TI - Mechanical properties of thin films deposited by TVA and G-TVA methods JF - Chemicke Listy VL - 105/2011 IS - 14 SP - 132-135 EP - 132-135 PB - Asociace českých chemických společností SN - 00092770 KW - Thermionic Vacuum Arc KW - Gaseous Thermionic Vacuum Arc KW - DLC coatings KW - nanoindentation UR - http://www.chemicke-listy.cz/common/article-vol_105-issue_14-page_s132.html N2 - The Thermionic Vacuum Arc (TVA) plasma is a powerful technique able to growth thin films using solids as precursor in vacuum conditions. A large range of materials, even refractory metals were successfully deposited using this technique. In this paper an extension of TVA method from gases (G-TVA) for DLC synthesis is reported. The novelty consists in using a flow of methane, instead of the carbon rod used as anode in the classic TVA method. This expands enor- mously the applicability of the TVA technique for the synthe- sis of thin films from solids to gas precursors. The mechanical properties of the films deposited were investigated. The de- scribed methods enable to prepare carbon films with wide range of mechanical properties from polymer-like carbon up to hard diamond-like carbon. ER -
STOICA, Adrian, Rodica VLADOIU, Geavit MUSA, Victor CIUPINA, Mirela CONTULOV, Vilma BURŠÍKOVÁ and Olga BLÁHOVÁ. Mechanical properties of thin films deposited by TVA and G-TVA methods. \textit{Chemicke Listy}. Praha: Asociace českých chemických společností, 2011, 105/2011, No~14, p.~132-135. ISSN~0009-2770.
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