| SOUČEK, Pavel, Tereza SCHMIDTOVÁ, Lukáš ZÁBRANSKÝ, Vilma BURŠÍKOVÁ, Petr VAŠINA, Mojmír JÍLEK, Abdelaziz EL MEL, Pierre-Yves TESSIER, Jan SCHÄFER and Jiří BURŠÍK. Deposition and analyses of hard and thick well adherent nc-TiC/a-C:H coatings prepared by hybrid PVD-PECVD process. In E-MRS 2011 Spring Meeting. 2011. |
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@proceedings{938161,
author = {Souček, Pavel and Schmidtová, Tereza and Zábranský, Lukáš and Buršíková, Vilma and Vašina, Petr and Jílek, Mojmír and El Mel, Abdelaziz and Tessier, PierreandYves and Schäfer, Jan and Buršík, Jiří},
booktitle = {E-MRS 2011 Spring Meeting},
keywords = {nanocomposite; titanium; carbon; sputtering},
language = {eng},
title = {Deposition and analyses of hard and thick well adherent nc-TiC/a-C:H coatings prepared by hybrid PVD-PECVD process},
year = {2011}
}
TY - CONF
ID - 938161
AU - Souček, Pavel - Schmidtová, Tereza - Zábranský, Lukáš - Buršíková, Vilma - Vašina, Petr - Jílek, Mojmír - El Mel, Abdelaziz - Tessier, Pierre-Yves - Schäfer, Jan - Buršík, Jiří
PY - 2011
TI - Deposition and analyses of hard and thick well adherent nc-TiC/a-C:H coatings prepared by hybrid PVD-PECVD process
KW - nanocomposite
KW - titanium
KW - carbon
KW - sputtering
N2 - Deposition and analyses of hard and thick well adherent nc-TiC/a-C:H coatings prepared by hybrid PVD-PECVD process. Severeal micrometers thick coatings with hardness over 45 GPa and Young's modulus over 400 GPa was reached.
ER -
SOUČEK, Pavel, Tereza SCHMIDTOVÁ, Lukáš ZÁBRANSKÝ, Vilma BURŠÍKOVÁ, Petr VAŠINA, Mojmír JÍLEK, Abdelaziz EL MEL, Pierre-Yves TESSIER, Jan SCHÄFER and Jiří BURŠÍK. Deposition and analyses of hard and thick well adherent nc-TiC/a-C:H coatings prepared by hybrid PVD-PECVD process. In \textit{E-MRS 2011 Spring Meeting}. 2011.
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