Ellipsometric characterisation of thin films non-uniform in thickness

NEČAS, David, Daniel FRANTA, Vilma BURŠÍKOVÁ and Ivan OHLÍDAL. Ellipsometric characterisation of thin films non-uniform in thickness. Thin Solid Films. Elsevier, 2011, vol. 519, No 9, p. 2715-2717. ISSN 0040-6090. Available from: https://dx.doi.org/10.1016/j.tsf.2010.12.065.

Basic information

• Original name: Ellipsometric characterisation of thin films non-uniform in thickness
• Authors: NEČAS, David (203 Czech Republic, guarantor, belonging to the institution), Daniel FRANTA (203 Czech Republic, belonging to the institution), Vilma BURŠÍKOVÁ (203 Czech Republic, belonging to the institution) and Ivan OHLÍDAL (203 Czech Republic, belonging to the institution).
• Edition: Thin Solid Films, Elsevier, 2011, 0040-6090.

Other information

• Original language: English
• Type of outcome: Article in a journal
• Field of Study: 10306 Optics
• Country of publisher: Netherlands
• Confidentiality degree: is not subject to a state or trade secret
• WWW: URL
• Impact factor: Impact factor: 1.890
• RIV identification code: RIV/00216224:14310/11:00050721
• Organization unit: Faculty of Science
• Doi: http://dx.doi.org/10.1016/j.tsf.2010.12.065
• UT WoS: 000289174200032
• Keywords in English: Optical characterisation; Variable angle spectroscopic ellipsometry; Phase-modulated ellipsometry; Non-uniform thin films
• Tags: AKR, rivok
• Tags: International impact, Reviewed

Abstract

Ellipsometric formulae for thin films non-uniform in thickness are presented. A general type of thickness nonuniformity is considered and the influence of the varying angle of incidence is taken into account. The presented formulae are applied to the optical characterisation of polymer SiO2-like thin films exhibiting a relatively strong thickness non-uniformity. It is shown that the complete optical characterisation of these polymer thin films can be performed. Thus, the spectral dependences of the optical constants, mean thickness and parameters related to the shape of thickness non-uniformity can be determined.

Links

• FT-TA5/114, research and development project: Name: Vývoj technologie vytváření PECVD vrstev pro výrobu automobilové světelné techniky

Investor: Ministry of Industry and Trade of the CR, Development of technology of PECVD films formation for automotive lighting equipment

• MSM0021622411, plan (intention): Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface