Detailed Information on Publication Record
2011
Ellipsometric characterisation of thin films non-uniform in thickness
NEČAS, David, Daniel FRANTA, Vilma BURŠÍKOVÁ and Ivan OHLÍDALBasic information
Original name
Ellipsometric characterisation of thin films non-uniform in thickness
Authors
NEČAS, David (203 Czech Republic, guarantor, belonging to the institution), Daniel FRANTA (203 Czech Republic, belonging to the institution), Vilma BURŠÍKOVÁ (203 Czech Republic, belonging to the institution) and Ivan OHLÍDAL (203 Czech Republic, belonging to the institution)
Edition
Thin Solid Films, Elsevier, 2011, 0040-6090
Other information
Language
English
Type of outcome
Článek v odborném periodiku
Field of Study
10306 Optics
Country of publisher
Netherlands
Confidentiality degree
není předmětem státního či obchodního tajemství
References:
Impact factor
Impact factor: 1.890
RIV identification code
RIV/00216224:14310/11:00050721
Organization unit
Faculty of Science
UT WoS
000289174200032
Keywords in English
Optical characterisation; Variable angle spectroscopic ellipsometry; Phase-modulated ellipsometry; Non-uniform thin films
Tags
International impact, Reviewed
Změněno: 20/4/2012 10:25, Ing. Andrea Mikešková
Abstract
V originále
Ellipsometric formulae for thin films non-uniform in thickness are presented. A general type of thickness nonuniformity is considered and the influence of the varying angle of incidence is taken into account. The presented formulae are applied to the optical characterisation of polymer SiO2-like thin films exhibiting a relatively strong thickness non-uniformity. It is shown that the complete optical characterisation of these polymer thin films can be performed. Thus, the spectral dependences of the optical constants, mean thickness and parameters related to the shape of thickness non-uniformity can be determined.
Links
| FT-TA5/114, research and development project |
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| MSM0021622411, plan (intention) |
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