Depth profile analyses of nc-TiC/a-C:H coating prepared by
balanced magnetron sputtering

J 2011

Depth profile analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering

VAŠINA, Petr, Pavel SOUČEK, Tereza SCHMIDTOVÁ, Marek ELIÁŠ, Vilma BURŠÍKOVÁ et. al.

Basic information

Original name

Depth profile analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering

Authors

VAŠINA, Petr (203 Czech Republic, guarantor, belonging to the institution), Pavel SOUČEK (203 Czech Republic, belonging to the institution), Tereza SCHMIDTOVÁ (203 Czech Republic, belonging to the institution), Marek ELIÁŠ (203 Czech Republic, belonging to the institution), Vilma BURŠÍKOVÁ (203 Czech Republic, belonging to the institution), Mojmír JÍLEK (203 Czech Republic), Mojmír Jr. JÍLEK (203 Czech Republic), Jan SCHÄFER (276 Germany) and Jiří BURŠÍK (203 Czech Republic)

Edition

Surface & Coatings Technology, Elsevier Science, 2011, 0257-8972

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10305 Fluids and plasma physics

Country of publisher

Germany

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

URL

Impact factor

Impact factor: 1.867

RIV identification code

RIV/00216224:14310/11:00049858

Organization unit

Faculty of Science

DOI

http://dx.doi.org/10.1016/j.surfcoat.2011.02.038

UT WoS

000293258600011

Keywords in English

Composite; Mechanical properties; Magnetron; Carbon; Titanium

Abstract

V originále

Nanocrystalline titanium carbide embedded in an hydrogenated amorphous carbon matrix (nc-TiC/a-C:H) shows high hardness and Young's modulus together with low wear and low friction coefficient. In this paper, we report on the preparation of well adherent nc-TiC/a-C:H coatings ~5 um thick on stainless steel substrates using a well balanced magnetic field configuration and only very low power RF bias on the substrate. Hardness and Young's modulus of these coatings are 43 GPa and 380 GPa, respectively. The mechanical properties – hardness and Young's modulus – measured from the coating's top reach the values obtained at optimized experiments where the unbalanced magnetic field configuration was used. A simple method of depth profiling suitable for evaluation of mechanical properties of several micrometers thick coatings is developed and employed. The paper reports on the depth profile analyses of the coating hardness, Young's modulus, composition and morphology.

Links

ED2.1.00/03.0086, research and development project

Name: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

GD104/09/H080, research and development project

Name: Plazmochemické procesy a jejich technologické aplikace

Investor: Czech Science Foundation

GP202/08/P038, research and development project

Name: Studium chování hybridního depozičního procesu a jeho využití pro přípravu tenkých vrstev

Investor: Czech Science Foundation, Study of hybrid deposition process and its application for thin film deposition

MSM0021622411, plan (intention)

Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface

Citovat

VAŠINA, Petr, Pavel SOUČEK, Tereza SCHMIDTOVÁ, Marek ELIÁŠ, Vilma BURŠÍKOVÁ, Mojmír JÍLEK, Mojmír Jr. JÍLEK, Jan SCHÄFER and Jiří BURŠÍK. Depth profile analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering. Surface & Coatings Technology. Elsevier Science, 2011, vol. 205, July, p. 53-56. ISSN 0257-8972. Available from: https://dx.doi.org/10.1016/j.surfcoat.2011.02.038.

@article{944455,
   author = {Vašina, Petr and Souček, Pavel and Schmidtová, Tereza and Eliáš, Marek and Buršíková, Vilma and Jílek, Mojmír and Jílek, Mojmír Jr. and Schäfer, Jan and Buršík, Jiří},
   article_number = {July},
   doi = {http://dx.doi.org/10.1016/j.surfcoat.2011.02.038},
   keywords = {Composite; Mechanical properties; Magnetron; Carbon; Titanium},
   language = {eng},
   issn = {0257-8972},
   journal = {Surface & Coatings Technology},
   title = {Depth profile analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering},
   url = {https://www.sciencedirect.com/science/article/pii/S0257897211001381},
   volume = {205},
   year = {2011}
}

TY  - JOUR
ID  - 944455
AU  - Vašina, Petr - Souček, Pavel - Schmidtová, Tereza - Eliáš, Marek - Buršíková, Vilma - Jílek, Mojmír - Jílek, Mojmír Jr. - Schäfer, Jan - Buršík, Jiří
PY  - 2011
TI  - Depth profile analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering
JF  - Surface & Coatings Technology
VL  - 205
IS  - July
SP  - 53-56
EP  - 53-56
PB  - Elsevier Science
SN  - 02578972
KW  - Composite
KW  - Mechanical properties
KW  - Magnetron
KW  - Carbon
KW  - Titanium
UR  - https://www.sciencedirect.com/science/article/pii/S0257897211001381
N2  - Nanocrystalline titanium carbide embedded in an hydrogenated amorphous carbon matrix (nc-TiC/a-C:H) shows high hardness and Young's modulus together with low wear and low friction coefficient. In this paper, we report on the preparation of well adherent nc-TiC/a-C:H coatings ~5 um thick on stainless steel substrates using a well balanced magnetic field configuration and only very low power RF bias on the substrate. Hardness and Young's modulus of these coatings are 43 GPa and 380 GPa, respectively. The mechanical properties – hardness and Young's modulus – measured from the coating's top reach the values obtained at optimized experiments where the unbalanced magnetic field configuration was used. A simple method of depth profiling suitable for evaluation of mechanical properties of several micrometers thick coatings is developed and employed. The paper reports on the depth profile analyses of the coating hardness, Young's modulus, composition and morphology.
ER  -

VAŠINA, Petr, Pavel SOUČEK, Tereza SCHMIDTOVÁ, Marek ELIÁŠ, Vilma BURŠÍKOVÁ, Mojmír JÍLEK, Mojmír Jr. JÍLEK, Jan SCHÄFER and Jiří BURŠÍK. Depth profile analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering. \textit{Surface \&{} Coatings Technology}. Elsevier Science, 2011, vol.~205, July, p.~53-56. ISSN~0257-8972. Available from: https://dx.doi.org/10.1016/j.surfcoat.2011.02.038.

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