VAŠINA, Petr, Pavel SOUČEK, Tereza SCHMIDTOVÁ, Marek ELIÁŠ, Vilma BURŠÍKOVÁ, Mojmír JÍLEK, Mojmír Jr. JÍLEK, Jan SCHÄFER and Jiří BURŠÍK. Depth profile analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering. Surface & Coatings Technology. Elsevier Science, 2011, vol. 205, July, p. 53-56. ISSN 0257-8972.
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Basic information
Original name Depth profile analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering
Authors VAŠINA, Petr (203 Czech Republic, guarantor, belonging to the institution), Pavel SOUČEK (203 Czech Republic, belonging to the institution), Tereza SCHMIDTOVÁ (203 Czech Republic, belonging to the institution), Marek ELIÁŠ (203 Czech Republic, belonging to the institution), Vilma BURŠÍKOVÁ (203 Czech Republic, belonging to the institution), Mojmír JÍLEK (203 Czech Republic), Mojmír Jr. JÍLEK (203 Czech Republic), Jan SCHÄFER (276 Germany) and Jiří BURŠÍK (203 Czech Republic).
Edition Surface & Coatings Technology, Elsevier Science, 2011, 0257-8972.
Other information
Original language English
Type of outcome Article in a journal
Field of Study 10305 Fluids and plasma physics
Country of publisher Germany
Confidentiality degree is not subject to a state or trade secret
Impact factor Impact factor: 1.867
RIV identification code RIV/00216224:14310/11:00049858
Organization unit Faculty of Science
UT WoS 000293258600011
Keywords in English Composite; Mechanical properties; Magnetron; Carbon; Titanium
Tags AKR, rivok
Changed by Changed by: Ing. Andrea Mikešková, učo 137293. Changed: 14/3/2012 11:10.
Abstract
Nanocrystalline titanium carbide embedded in an hydrogenated amorphous carbon matrix (nc-TiC/a-C:H) shows high hardness and Young's modulus together with low wear and low friction coefficient. In this paper, we report on the preparation of well adherent nc-TiC/a-C:H coatings ~5 um thick on stainless steel substrates using a well balanced magnetic field configuration and only very low power RF bias on the substrate. Hardness and Young's modulus of these coatings are 43 GPa and 380 GPa, respectively. The mechanical properties – hardness and Young's modulus – measured from the coating's top reach the values obtained at optimized experiments where the unbalanced magnetic field configuration was used. A simple method of depth profiling suitable for evaluation of mechanical properties of several micrometers thick coatings is developed and employed. The paper reports on the depth profile analyses of the coating hardness, Young's modulus, composition and morphology.
Links
ED2.1.00/03.0086, research and development projectName: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy
GD104/09/H080, research and development projectName: Plazmochemické procesy a jejich technologické aplikace
Investor: Czech Science Foundation
GP202/08/P038, research and development projectName: Studium chování hybridního depozičního procesu a jeho využití pro přípravu tenkých vrstev
Investor: Czech Science Foundation, Study of hybrid deposition process and its application for thin film deposition
MSM0021622411, plan (intention)Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
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