a 2011

Properties of nanocomposite coatings prepared by hybrid process of metallic target sputtering in argon and acetylene

VAŠINA, Petr, Pavel SOUČEK, Tereza SCHMIDTOVÁ, Lukáš ZÁBRANSKÝ, Vilma BURŠÍKOVÁ et. al.

Basic information

Original name

Properties of nanocomposite coatings prepared by hybrid process of metallic target sputtering in argon and acetylene

Authors

VAŠINA, Petr (203 Czech Republic, guarantor, belonging to the institution), Pavel SOUČEK (203 Czech Republic, belonging to the institution), Tereza SCHMIDTOVÁ (203 Czech Republic, belonging to the institution), Lukáš ZÁBRANSKÝ (203 Czech Republic, belonging to the institution), Vilma BURŠÍKOVÁ (203 Czech Republic, belonging to the institution), Jiří BURŠÍK (203 Czech Republic), Ondřej CAHA (203 Czech Republic, belonging to the institution), Vratislav PEŘINA (203 Czech Republic) and Romana MIKSOVÁ (203 Czech Republic)

Edition

30th ICPIG Conference Proceedings, 2011

Other information

Language

English

Type of outcome

Konferenční abstrakt

Field of Study

10305 Fluids and plasma physics

Country of publisher

Czech Republic

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

RIV identification code

RIV/00216224:14310/11:00049989

Organization unit

Faculty of Science

Keywords (in Czech)

nanakompozit; titan; uhlík; mechanické vlastnosti

Keywords in English

nanocomposite; titanium; carbon; mechanical properties
Změněno: 6/1/2012 10:45, doc. Mgr. Pavel Souček, Ph.D.

Abstract

V originále

The contribution reports on properties of nc-TiC/a-C:H coatings consisting of TiC (titanium carbide) crystallites of characteristic size ranging from several to several tens of nm embedded in hydrogenated carbon based matrix. The coatings were prepared by a hybrid deposition process combining PVD (sputtering of metallic target) and PECVD (plasma in mixture of Ar and acetylene) aspects. These coatings are usually prepared at conditions of very high ion bombardment. We have shown that only relatively low ion bombardment is enough to prepare coatings of very good quality (good adhesion, high hardness and Young’s modulus). Moreover, at these conditions, the stress in the coating is very low and coating with high thickness (even 10 micrometers) can be prepared.

Links

ED2.1.00/03.0086, research and development project
Name: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy
GD104/09/H080, research and development project
Name: Plazmochemické procesy a jejich technologické aplikace
Investor: Czech Science Foundation
MSM0021622411, plan (intention)
Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface