Multilayered films based on DLC, DLC:N and SiOx grown by PECVD on stainless steel

MURESAN, Mihai George, Lenka ZAJÍČKOVÁ, Vilma BURŠÍKOVÁ, Daniel FRANTA, David NEČAS and Vratislav PEŘINA. Multilayered films based on DLC, DLC:N and SiOx grown by PECVD on stainless steel. In E-MRS 2011 Spring Meeting. 2011.

Basic information

• Original name: Multilayered films based on DLC, DLC:N and SiOx grown by PECVD on stainless steel
• Authors: MURESAN, Mihai George (642 Romania, guarantor, belonging to the institution), Lenka ZAJÍČKOVÁ (203 Czech Republic, belonging to the institution), Vilma BURŠÍKOVÁ (203 Czech Republic, belonging to the institution), Daniel FRANTA (203 Czech Republic, belonging to the institution), David NEČAS (203 Czech Republic, belonging to the institution) and Vratislav PEŘINA (203 Czech Republic, belonging to the institution).
• Edition: E-MRS 2011 Spring Meeting, 2011.

Other information

• Original language: English
• Type of outcome: Conference abstract
• Field of Study: 10305 Fluids and plasma physics
• Country of publisher: France
• Confidentiality degree: is not subject to a state or trade secret
• RIV identification code: RIV/00216224:14310/11:00050060
• Organization unit: Faculty of Science
• Keywords in English: Diamond-like carbon DLC; Adhesion; Silicon oxide; Nitrogen doping; Stainless steel

Abstract

Diamond-like carbon films (DLC) exhibit useful properties such as high hardness, low friction coefficient, high thermal conductivity and wide band gaps. However, due to an inherent internal stress and bad adhesion to stainless steel their use in industrial applications is limited. A better adhesion can be achieved by adding different dopants into a DLC matrix, especially for metallic substrates. Also, silicon based interlayers was used In order to promote the adhesion. Hydrogenated DLC films using different mixtures were prepared by plasma enhanced chemical vapor deposition (PECVD) using capacitively coupled rf discharge at 13.56 MHz. Optical and mechanical methods were used to to determine functional properties. The hardness and Young's modulus of multilayered films were between 14 GPa and 80 GPa, respectively. For adhesion, the critical load Lc2 ranged from 2.1 N in the case of nitrogen containing DLC, to 11.8 N for multilayered film based on SiOx.

Links

• GD104/09/H080, research and development project: Name: Plazmochemické procesy a jejich technologické aplikace

Investor: Czech Science Foundation

• MSM0021622411, plan (intention): Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface