INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC

MURESAN, Mihai George, Lenka ZAJÍČKOVÁ, Vilma BURŠÍKOVÁ, Daniel FRANTA, David NEČAS, Vratislav PEŘINA and Romana MIKŠOVÁ. INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC. In 12th International Balkan Workshop on Applied Physics, 2011. 2011.

Basic information

• Original name: INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC
• Authors: MURESAN, Mihai George (642 Romania, guarantor, belonging to the institution), Lenka ZAJÍČKOVÁ (203 Czech Republic, belonging to the institution), Vilma BURŠÍKOVÁ (203 Czech Republic, belonging to the institution), Daniel FRANTA (203 Czech Republic, belonging to the institution), David NEČAS (203 Czech Republic, belonging to the institution), Vratislav PEŘINA (203 Czech Republic, belonging to the institution) and Romana MIKŠOVÁ (203 Czech Republic).
• Edition: 12th International Balkan Workshop on Applied Physics, 2011, 2011.

Other information

• Original language: English
• Type of outcome: Conference abstract
• Field of Study: 10305 Fluids and plasma physics
• Country of publisher: Romania
• Confidentiality degree: is not subject to a state or trade secret
• RIV identification code: RIV/00216224:14310/11:00050061
• Organization unit: Faculty of Science
• Keywords in English: Diamond-like carbon; Amorphous hydrogenated carbon; Optical properties; Nitrogen

Abstract

Interesting properties of diamond-like carbon (DLC) coatings such as high hardness, low friction coefficient, high thermal conductivity and wide band gaps have increased the number of industrial partners to research ways of producing DLC layers with chemical inertness, high gas barrier properties and high biocompatibility. The aim of the experiments was to characterize and compare the properties of diamond-like carbon films prepared from different mixtures such as CH4/H2, CH4/H2/N2 and CH4/Ar from a radiofrequency capacitively-coupled discharge at 13.56 MHz. Parameters like concentration, pressure, power and time were changed to vary film properties. The films were optically characterized by UV-VIS reflectometry, ellipsometry. Layer composition was investigated by FTIR transmittance and Rutherford backscattering spectrometry (RBS) in combination with elastic recoil detection analysis (ERDA). The mechanical properties were assessed by depth-sensing indentation (DSI).

Links

• GD104/09/H080, research and development project: Name: Plazmochemické procesy a jejich technologické aplikace

Investor: Czech Science Foundation

• MSM0021622411, plan (intention): Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface