INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF
HYDROGEN OR NITROGEN INTO DLC

a 2011

INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC

MURESAN, Mihai George, Lenka ZAJÍČKOVÁ, Vilma BURŠÍKOVÁ, Daniel FRANTA, David NEČAS et. al.

Basic information

Original name

INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC

Authors

MURESAN, Mihai George (642 Romania, guarantor, belonging to the institution), Lenka ZAJÍČKOVÁ (203 Czech Republic, belonging to the institution), Vilma BURŠÍKOVÁ (203 Czech Republic, belonging to the institution), Daniel FRANTA (203 Czech Republic, belonging to the institution), David NEČAS (203 Czech Republic, belonging to the institution), Vratislav PEŘINA (203 Czech Republic, belonging to the institution) and Romana MIKŠOVÁ (203 Czech Republic)

Edition

12th International Balkan Workshop on Applied Physics, 2011, 2011

Other information

Language

English

Type of outcome

Konferenční abstrakt

Field of Study

10305 Fluids and plasma physics

Country of publisher

Romania

Confidentiality degree

není předmětem státního či obchodního tajemství

RIV identification code

RIV/00216224:14310/11:00050061

Organization unit

Faculty of Science

Keywords in English

Diamond-like carbon; Amorphous hydrogenated carbon; Optical properties; Nitrogen

Změněno: 5/12/2011 13:56, Mihai George Muresan, Ph.D., M.Sc.

Abstract

V originále

Interesting properties of diamond-like carbon (DLC) coatings such as high hardness, low friction coefficient, high thermal conductivity and wide band gaps have increased the number of industrial partners to research ways of producing DLC layers with chemical inertness, high gas barrier properties and high biocompatibility. The aim of the experiments was to characterize and compare the properties of diamond-like carbon films prepared from different mixtures such as CH4/H2, CH4/H2/N2 and CH4/Ar from a radiofrequency capacitively-coupled discharge at 13.56 MHz. Parameters like concentration, pressure, power and time were changed to vary film properties. The films were optically characterized by UV-VIS reflectometry, ellipsometry. Layer composition was investigated by FTIR transmittance and Rutherford backscattering spectrometry (RBS) in combination with elastic recoil detection analysis (ERDA). The mechanical properties were assessed by depth-sensing indentation (DSI).

Links

GD104/09/H080, research and development project

Name: Plazmochemické procesy a jejich technologické aplikace

Investor: Czech Science Foundation

MSM0021622411, plan (intention)

Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface

Citovat

MURESAN, Mihai George, Lenka ZAJÍČKOVÁ, Vilma BURŠÍKOVÁ, Daniel FRANTA, David NEČAS, Vratislav PEŘINA and Romana MIKŠOVÁ. INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC. In 12th International Balkan Workshop on Applied Physics, 2011. 2011.

@proceedings{953441,
   author = {Muresan, Mihai George and Zajíčková, Lenka and Buršíková, Vilma and Franta, Daniel and Nečas, David and Peřina, Vratislav and Mikšová, Romana},
   booktitle = {12th International Balkan Workshop on Applied Physics, 2011},
   keywords = {Diamond-like carbon; Amorphous hydrogenated carbon; Optical properties; Nitrogen},
   language = {eng},
   title = {INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC},
   year = {2011}
}

TY  - CONF
ID  - 953441
AU  - Muresan, Mihai George - Zajíčková, Lenka - Buršíková, Vilma - Franta, Daniel - Nečas, David - Peřina, Vratislav - Mikšová, Romana
PY  - 2011
TI  - INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC
KW  - Diamond-like carbon
KW  - Amorphous hydrogenated carbon
KW  - Optical properties
KW  - Nitrogen
N2  - Interesting properties of diamond-like carbon (DLC) coatings such as high hardness, low friction coefficient, high thermal conductivity and wide band gaps have increased the number of industrial partners to research ways of producing DLC layers with chemical inertness, high gas barrier properties and high biocompatibility. The aim of the experiments was to characterize and compare the properties of diamond-like carbon films prepared from different mixtures such as CH4/H2, CH4/H2/N2 and CH4/Ar from a radiofrequency capacitively-coupled discharge at 13.56 MHz. Parameters like concentration, pressure, power and time were changed to vary film properties. The films were optically characterized by UV-VIS reflectometry, ellipsometry. Layer composition was investigated by FTIR transmittance and Rutherford backscattering spectrometry (RBS) in combination with elastic recoil detection analysis (ERDA). The mechanical properties were assessed by depth-sensing indentation (DSI).
ER  -

MURESAN, Mihai George, Lenka ZAJÍČKOVÁ, Vilma BURŠÍKOVÁ, Daniel FRANTA, David NEČAS, Vratislav PEŘINA and Romana MIKŠOVÁ. INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC. In \textit{12th International Balkan Workshop on Applied Physics, 2011}. 2011.

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