Characterization of ultrananocrystalline diamond thin films using low energy scanning electron microscopy

ŠPERKA, Jiří, Lenka ZAJÍČKOVÁ, Ondřej JAŠEK, Pavel DVOŘÁK, Šárka MIKMEKOVÁ and Jan SCHÄFER. Characterization of ultrananocrystalline diamond thin films using low energy scanning electron microscopy. In Potential and Applications of Surface Nanotreatment of Polymers and Glass. 2011.

Basic information

• Original name: Characterization of ultrananocrystalline diamond thin films using low energy scanning electron microscopy
• Authors: ŠPERKA, Jiří (203 Czech Republic, belonging to the institution), Lenka ZAJÍČKOVÁ (203 Czech Republic, guarantor, belonging to the institution), Ondřej JAŠEK (203 Czech Republic, belonging to the institution), Pavel DVOŘÁK (203 Czech Republic, belonging to the institution), Šárka MIKMEKOVÁ (203 Czech Republic) and Jan SCHÄFER (203 Czech Republic).
• Edition: Potential and Applications of Surface Nanotreatment of Polymers and Glass, 2011.

Other information

• Original language: English
• Type of outcome: Conference abstract
• Field of Study: 10305 Fluids and plasma physics
• Country of publisher: Czech Republic
• Confidentiality degree: is not subject to a state or trade secret
• RIV identification code: RIV/00216224:14310/11:00050070
• Organization unit: Faculty of Science
• Keywords (in Czech): ultrananokrystalický diamant; nízkoenergiová rastrovací elektronová mikroskopie
• Keywords in English: ultrananocrystalline diamond;low energy scanning electron microscopy

Abstract

This paper deals with the low energy scanning electron microscopy characterization of ultrananocrystalline diamond films. These films were prepared by plasma enhanced chemical vapor deposition (PECVD) using dual frequency discharge.

Links

• GAP205/10/1374, research and development project: Name: Syntéza uhlíkových nanotrubek plazmochemickou metodou a studium jejich funkčních vlastností

Investor: Czech Science Foundation

• MSM0021622411, plan (intention): Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface