On the effect of carbon content on the mechanical properties of nc-TiC/a-C:H coatings prepared by balanced magnetron sputtering

SOUČEK, Pavel, Tereza SCHMIDTOVÁ, Lukáš ZÁBRANSKÝ, Vilma BURŠÍKOVÁ, Petr VAŠINA, Ondřej CAHA, Jiří BURŠÍK and Vratislav PEŘINA. On the effect of carbon content on the mechanical properties of nc-TiC/a-C:H coatings prepared by balanced magnetron sputtering. In Potential and Applications of Surface Nanotreatment of Polymers and Glass. 2011.

Basic information

Original name

On the effect of carbon content on the mechanical properties of nc-TiC/a-C:H coatings prepared by balanced magnetron sputtering

Authors

SOUČEK, Pavel (203 Czech Republic, belonging to the institution), Tereza SCHMIDTOVÁ (203 Czech Republic, belonging to the institution), Lukáš ZÁBRANSKÝ (203 Czech Republic, belonging to the institution), Vilma BURŠÍKOVÁ (203 Czech Republic, belonging to the institution), Petr VAŠINA (203 Czech Republic, guarantor, belonging to the institution), Ondřej CAHA (203 Czech Republic, belonging to the institution), Jiří BURŠÍK (203 Czech Republic) and Vratislav PEŘINA (203 Czech Republic)

Edition

Potential and Applications of Surface Nanotreatment of Polymers and Glass, 2011

---

Other information

Language

English

Type of outcome

Konferenční abstrakt

Field of Study

10305 Fluids and plasma physics

Country of publisher

Czech Republic

Confidentiality degree

není předmětem státního či obchodního tajemství

RIV identification code

RIV/00216224:14310/11:00050073

Organization unit

Faculty of Science

Keywords in English

nanocomposite; titanium; carbon; magnetron sputtering

---

Abstract

V originále

Thick hard adherent nc-TiC/a-C:H coatings were prepared by a hybrid PVD-PECVD process of Ti target sputtering in Ar/C2H2 atmosphere. The effect of carbon content on mechanical properties such as hardness, Young’s modulus and internal stress is studied in this contribution.

---

Links

ED2.1.00/03.0086, research and development project	Name: Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy
GD104/09/H080, research and development project	Name: Plazmochemické procesy a jejich technologické aplikace Investor: Czech Science Foundation
MSM0021622411, plan (intention)	Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface