| KUBĚNA, Josef, Alan KUBĚNA, Ondřej CAHA a Mojmír MEDUŇA. Homogeneous and heterogeneous nucleation of oxygen in Si-CZ. Solid State Phenomena. Switzerland: Trans Tech Publications, Neuveden, 178-179, s. 495-500. ISSN 1012-0394. 2011. |
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@article{964585,
author = {Kuběna, Josef and Kuběna, Alan and Caha, Ondřej and Meduňa, Mojmír},
article_location = {Switzerland},
article_number = {178-179},
keywords = {Interstitials; Nucleation; Precipitation; Silicon; Vacancies},
language = {eng},
issn = {1012-0394},
journal = {Solid State Phenomena},
title = {Homogeneous and heterogeneous nucleation of oxygen in Si-CZ},
volume = {Neuveden},
year = {2011}
}
TY - JOUR
ID - 964585
AU - Kuběna, Josef - Kuběna, Alan - Caha, Ondřej - Meduňa, Mojmír
PY - 2011
TI - Homogeneous and heterogeneous nucleation of oxygen in Si-CZ
JF - Solid State Phenomena
VL - Neuveden
IS - 178-179
SP - 495-500
EP - 495-500
PB - Trans Tech Publications
SN - 10120394
KW - Interstitials
KW - Nucleation
KW - Precipitation
KW - Silicon
KW - Vacancies
N2 - We present numerical simulations of nucleation kinetics of vacancies and interstitials during RTA and we study the impact of annealing temperature on bulk micro defect concentration.
ER -
KUBĚNA, Josef, Alan KUBĚNA, Ondřej CAHA a Mojmír MEDUŇA. Homogeneous and heterogeneous nucleation of oxygen in Si-CZ. \textit{Solid State Phenomena}. Switzerland: Trans Tech Publications, Neuveden, 178-179, s.~495-500. ISSN~1012-0394. 2011.
|
