J 2011

Homogeneous and heterogeneous nucleation of oxygen in Si-CZ

KUBĚNA, Josef, Alan KUBĚNA, Ondřej CAHA and Mojmír MEDUŇA

Basic information

Original name

Homogeneous and heterogeneous nucleation of oxygen in Si-CZ

Name in Czech

Homogenni a heterogenní nukleace kyslíku v Si-CZ

Authors

KUBĚNA, Josef (203 Czech Republic, guarantor, belonging to the institution), Alan KUBĚNA (203 Czech Republic, belonging to the institution), Ondřej CAHA (203 Czech Republic, belonging to the institution) and Mojmír MEDUŇA (203 Czech Republic, belonging to the institution)

Edition

Solid State Phenomena, Switzerland, Trans Tech Publications, 2011, 1012-0394

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10302 Condensed matter physics

Country of publisher

Switzerland

Confidentiality degree

není předmětem státního či obchodního tajemství

Impact factor

Impact factor: 0.493 in 2005

RIV identification code

RIV/00216224:14740/11:00050318

Organization unit

Central European Institute of Technology

UT WoS

000303356300077

Keywords (in Czech)

Intersticiály; nukleace; precipitace; křemík; vakance

Keywords in English

Interstitials; Nucleation; Precipitation; Silicon; Vacancies

Tags

Tags

International impact, Reviewed
Změněno: 4/4/2014 17:14, Mgr. Mojmír Meduňa, Ph.D.

Abstract

V originále

We present numerical simulations of nucleation kinetics of vacancies and interstitials during RTA and we study the impact of annealing temperature on bulk micro defect concentration.

In Czech

Prezentujeme numerické simulace nukleační kinetiky vakancí a intersticiálů během RTA a studujeme vliv žíhací teploty na hustotu BMD.

Links

ED1.1.00/02.0068, research and development project
Name: CEITEC - central european institute of technology
GA202/09/1013, research and development project
Name: Nukleace a růst kyslíkových precipitátů v křemíku
Investor: Czech Science Foundation, Nucleation and growth of oxygen precipitates in silicon
MSM0021622410, plan (intention)
Name: Fyzikální a chemické vlastnosti pokročilých materiálů a struktur
Investor: Ministry of Education, Youth and Sports of the CR, Physical and chemical properties of advanced materials and structures