| MEDUŇA, Mojmír, Ondřej CAHA, Jiří RŮŽIČKA, Silvie BERNATOVÁ, Milan SVOBODA a Jiří BURŠÍK. Oxygen precipitation studied by x-ray diffraction techniques. Solid State Phenomena. Trans Tech Publications, Neuveden, 178-179, s. 325-330. ISSN 1012-0394. 2011. |
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@article{964589,
author = {Meduňa, Mojmír and Caha, Ondřej and Růžička, Jiří and Bernatová, Silvie and Svoboda, Milan and Buršík, Jiří},
article_number = {178-179},
keywords = {Czochralski silicon; oxygen precipitates; x-ray Laue diffraction},
language = {eng},
issn = {1012-0394},
journal = {Solid State Phenomena},
title = {Oxygen precipitation studied by x-ray diffraction techniques},
volume = {Neuveden},
year = {2011}
}
TY - JOUR
ID - 964589
AU - Meduňa, Mojmír - Caha, Ondřej - Růžička, Jiří - Bernatová, Silvie - Svoboda, Milan - Buršík, Jiří
PY - 2011
TI - Oxygen precipitation studied by x-ray diffraction techniques
JF - Solid State Phenomena
VL - Neuveden
IS - 178-179
SP - 325-330
EP - 325-330
PB - Trans Tech Publications
SN - 10120394
KW - Czochralski silicon
KW - oxygen precipitates
KW - x-ray Laue diffraction
N2 - We report on study of oxygen precipitates grown in Czochralski silicon wafers investigated by x-ray diffraction in Bragg reflection geometry and Laue transmission geometry.
ER -
MEDUŇA, Mojmír, Ondřej CAHA, Jiří RŮŽIČKA, Silvie BERNATOVÁ, Milan SVOBODA a Jiří BURŠÍK. Oxygen precipitation studied by x-ray diffraction techniques. \textit{Solid State Phenomena}. Trans Tech Publications, Neuveden, 178-179, s.~325-330. ISSN~1012-0394. 2011.
|
