On the implementation of computed laminography using
synchrotron radiation

J 2011

On the implementation of computed laminography using synchrotron radiation

HELFEN, L., A. MYAGOTIN, Petr MIKULÍK, P. PERNOT, A. VOROPAEV et. al.

Basic information

Original name

On the implementation of computed laminography using synchrotron radiation

Authors

HELFEN, L. (276 Germany), A. MYAGOTIN (643 Russian Federation), Petr MIKULÍK (203 Czech Republic, guarantor, belonging to the institution), P. PERNOT (203 Czech Republic), A. VOROPAEV (643 Russian Federation), M. ELYYAN (276 Germany), M. DI MICHIEL (380 Italy), J. BARUCHEL (250 France) and T. BAUMBACH (276 Germany)

Edition

Review of Scientific Instruments, Melville (USA), American Institute of Physics, 2011, 0034-6748

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10302 Condensed matter physics

Country of publisher

United States of America

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

URL

Impact factor

Impact factor: 1.367

RIV identification code

RIV/00216224:14310/11:00054740

Organization unit

Faculty of Science

UT WoS

000292334000031

Keywords in English

x-ray imaging; laminography; synchrotron radiation; radiography; CT

Abstract

V originále

Hard x rays from a synchrotron source are used in this implementation of computed laminography for three-dimensional (3D) imaging of flat, laterally extended objects. Due to outstanding properties of synchrotron light, high spatial resolution down to the micrometer scale can be attained, even for specimens having lateral dimensions of several decimeters. Operating either with a monochromatic or with a white synchrotron beam, the method can be optimized to attain high sensitivity or considerable inspection throughput in synchrotron user and small-batch industrial experiments. The article describes the details of experimental setups, alignment procedures, and the underlying reconstruction principles. Imaging of interconnections in flip-chip and wire-bonded devices illustrates the peculiarities of the method compared to its alternatives and demonstrates the wide application potential for the 3D inspection and quality assessment in microsystem technology.

Links

MSM0021622410, plan (intention)

Name: Fyzikální a chemické vlastnosti pokročilých materiálů a struktur

Investor: Ministry of Education, Youth and Sports of the CR, Physical and chemical properties of advanced materials and structures

Citovat

HELFEN, L., A. MYAGOTIN, Petr MIKULÍK, P. PERNOT, A. VOROPAEV, M. ELYYAN, M. DI MICHIEL, J. BARUCHEL and T. BAUMBACH. On the implementation of computed laminography using synchrotron radiation. Review of Scientific Instruments. Melville (USA): American Institute of Physics, 2011, vol. 82, No 1, p. "nestrankovano", 8 pp. ISSN 0034-6748.

@article{964883,
   author = {Helfen, L. and Myagotin, A. and Mikulík, Petr and Pernot, P. and Voropaev, A. and Elyyan, M. and Di Michiel, M. and Baruchel, J. and Baumbach, T.},
   article_location = {Melville (USA)},
   article_number = {1},
   keywords = {x-ray imaging; laminography; synchrotron radiation; radiography; CT},
   language = {eng},
   issn = {0034-6748},
   journal = {Review of Scientific Instruments},
   title = {On the implementation of computed laminography using synchrotron radiation},
   url = {http://rsi.aip.org/resource/1/rsinak/v82/i6/p063702_s1?isAuthorized=no},
   volume = {82},
   year = {2011}
}

TY  - JOUR
ID  - 964883
AU  - Helfen, L. - Myagotin, A. - Mikulík, Petr - Pernot, P. - Voropaev, A. - Elyyan, M. - Di Michiel, M. - Baruchel, J. - Baumbach, T.
PY  - 2011
TI  - On the implementation of computed laminography using synchrotron radiation
JF  - Review of Scientific Instruments
VL  - 82
IS  - 1
SP  - "nestrankovano"
EP  - "nestrankovano"
PB  - American Institute of Physics
SN  - 00346748
KW  - x-ray imaging
KW  - laminography
KW  - synchrotron radiation
KW  - radiography
KW  - CT
UR  - http://rsi.aip.org/resource/1/rsinak/v82/i6/p063702_s1?isAuthorized=no
N2  - Hard x rays from a synchrotron source are used in this implementation of computed laminography for three-dimensional (3D) imaging of flat, laterally extended objects. Due to outstanding properties of synchrotron light, high spatial resolution down to the micrometer scale can be attained, even for specimens having lateral dimensions of several decimeters. Operating either with a monochromatic or with a white synchrotron beam, the method can be optimized to attain high sensitivity or considerable inspection throughput in synchrotron user and small-batch industrial experiments. The article describes the details of experimental setups, alignment procedures, and the underlying reconstruction principles. Imaging of interconnections in flip-chip and wire-bonded devices illustrates the peculiarities of the method compared to its alternatives and demonstrates the wide application potential for the 3D inspection and quality assessment in microsystem technology.
ER  -

HELFEN, L., A. MYAGOTIN, Petr MIKULÍK, P. PERNOT, A. VOROPAEV, M. ELYYAN, M. DI MICHIEL, J. BARUCHEL and T. BAUMBACH. On the implementation of computed laminography using synchrotron radiation. \textit{Review of Scientific Instruments}. Melville (USA): American Institute of Physics, 2011, vol.~82, No~1, p.~''nestrankovano'', 8 pp. ISSN~0034-6748.

Detailed Information on Publication Record