J 2011

Variable-angle spectroscopic ellipsometry of considerably non-uniform thin films

NEČAS, David, Ivan OHLÍDAL and Daniel FRANTA

Basic information

Original name

Variable-angle spectroscopic ellipsometry of considerably non-uniform thin films

Name in Czech

Víceúhlová spektroskopická elipsometrie značně ne-uniformních tenkých vrstev

Authors

NEČAS, David (203 Czech Republic, guarantor, belonging to the institution), Ivan OHLÍDAL (203 Czech Republic, belonging to the institution) and Daniel FRANTA (203 Czech Republic, belonging to the institution)

Edition

Journal of Optics, Bristol, IOP Publishing, 2011, 2040-8978

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10306 Optics

Country of publisher

United Kingdom of Great Britain and Northern Ireland

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

Impact factor

Impact factor: 1.573

RIV identification code

RIV/00216224:14310/11:00050732

Organization unit

Faculty of Science

DOI

UT WoS

000294294500018

Keywords (in Czech)

elipsometrie; tenké vrstvy; neuniformita

Keywords in English

ellipsometry; thin films; non-uniformity

Tags

Tags

International impact, Reviewed
Změněno: 20/4/2012 12:03, Ing. Andrea Mikešková

Abstract

V originále

A theoretical approach for including considerable thickness non-uniformity of thin films into the formulae employed within variable-angle spectroscopic ellipsometry is presented. It is based on a combination of the efficient formulae derived for the thickness distribution density corresponding to a wedge-shaped non-uniformity with dependences of the mean thickness and root mean square (rms) of thickness differences on the angle of incidence that take into account the real non-uniformity of the shape. These dependences are derived using momentum expansion of the thickness distribution density. The derived formulae are tested by means of numerical analysis. An application of this approach is illustrated using the optical characterization of a selected sample of non-uniform SiOxCyHz thin films using phase-modulated ellipsometry.

Links

ED1.1.00/02.0068, research and development project
Name: CEITEC - central european institute of technology
FT-TA5/114, research and development project
Name: Vývoj technologie vytváření PECVD vrstev pro výrobu automobilové světelné techniky
Investor: Ministry of Industry and Trade of the CR, Development of technology of PECVD films formation for automotive lighting equipment
MSM0021622411, plan (intention)
Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface