| NEČAS, David, Ivan OHLÍDAL and Daniel FRANTA. Variable-angle spectroscopic ellipsometry of considerably non-uniform thin films. Journal of Optics. Bristol: IOP Publishing, 2011, vol. 13, No 8, p. "nestránkováno", 10 pp. ISSN 2040-8978. Available from: https://dx.doi.org/10.1088/2040-8978/13/8/085705. |
Other formats:
BibTeX
LaTeX
RIS
@article{966931,
author = {Nečas, David and Ohlídal, Ivan and Franta, Daniel},
article_location = {Bristol},
article_number = {8},
doi = {http://dx.doi.org/10.1088/2040-8978/13/8/085705},
keywords = {ellipsometry; thin films; non-uniformity},
language = {eng},
issn = {2040-8978},
journal = {Journal of Optics},
title = {Variable-angle spectroscopic ellipsometry of considerably non-uniform thin films},
url = {http://iopscience.iop.org/2040-8986/13/8/085705/},
volume = {13},
year = {2011}
}
TY - JOUR
ID - 966931
AU - Nečas, David - Ohlídal, Ivan - Franta, Daniel
PY - 2011
TI - Variable-angle spectroscopic ellipsometry of considerably non-uniform thin films
JF - Journal of Optics
VL - 13
IS - 8
SP - "nestránkováno"
EP - "nestránkováno"
PB - IOP Publishing
SN - 20408978
KW - ellipsometry
KW - thin films
KW - non-uniformity
UR - http://iopscience.iop.org/2040-8986/13/8/085705/
L2 - http://iopscience.iop.org/2040-8986/13/8/085705/
N2 - A theoretical approach for including considerable thickness non-uniformity of thin films into the formulae employed within variable-angle spectroscopic ellipsometry is presented. It is based on a combination of the efficient formulae derived for the thickness distribution density corresponding to a wedge-shaped non-uniformity with dependences of the mean thickness and root mean square (rms) of thickness differences on the angle of incidence that take into account the real non-uniformity of the shape. These dependences are derived using momentum expansion of the thickness distribution density. The derived formulae are tested by means of numerical analysis. An application of this approach is illustrated using the optical characterization of a selected sample of non-uniform SiOxCyHz thin films using phase-modulated ellipsometry.
ER -
NEČAS, David, Ivan OHLÍDAL and Daniel FRANTA. Variable-angle spectroscopic ellipsometry of considerably non-uniform thin films. \textit{Journal of Optics}. Bristol: IOP Publishing, 2011, vol.~13, No~8, p.~''nestránkováno'', 10 pp. ISSN~2040-8978. Available from: https://dx.doi.org/10.1088/2040-8978/13/8/085705.
|
