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@inproceedings{977460,
author = {Zelina, Peter and Kudrle, Vít and Jašek, Ondřej},
address = {Plzeň},
booktitle = {Book of Extended Abstracts POTENTIAL AND APPLICATIONS OF THIN CERAMIC AND METAL COATINGS 2011},
edition = {1},
editor = {Pavel Baroch},
keywords = {flow measurement; PECVD; Prandtl-Pitot tube; Iron pentacarbonyl},
howpublished = {tištěná verze "print"},
language = {eng},
location = {Plzeň},
isbn = {978-80-261-0009-6},
pages = {87-88},
publisher = {University of West Bohemia},
title = {Alternative method for flow measurement of clog producing gases and liquids in PVD and PECVD processes},
year = {2011}
}
TY - JOUR
ID - 977460
AU - Zelina, Peter - Kudrle, Vít - Jašek, Ondřej
PY - 2011
TI - Alternative method for flow measurement of clog producing gases and liquids in PVD and PECVD processes
PB - University of West Bohemia
CY - Plzeň
SN - 9788026100096
KW - flow measurement
KW - PECVD
KW - Prandtl-Pitot tube
KW - Iron pentacarbonyl
N2 - In this work we present a method to measure gas flow where conventional mass flow-meters cannot be used. These are the cases when one operates with highly reactive gases, unstable substances or meets other difficulties. We successfully used Prandtl-Pitot tube for measurement of iron pentacarbonyl flow during the process of plasma synthesis of nanoparticles.
ER -
ZELINA, Peter, Vít KUDRLE and Ondřej JAŠEK. Alternative method for flow measurement of clog producing gases and liquids in PVD and PECVD processes. In Pavel Baroch. \textit{Book of Extended Abstracts POTENTIAL AND APPLICATIONS OF THIN CERAMIC AND METAL COATINGS 2011}. 1st ed. Plzeň: University of West Bohemia, 2011, p.~87-88. ISBN~978-80-261-0009-6.
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