TRUHLÁŘ, Michal, Tomáš KRUML, Ivo KUBĚNA, Klára PETRÁČKOVÁ and Luboš NÁHLÍK. Determination of mechanical properties from microcompression test. In Jiří Náprstník and Cyril Fischer. Engineering Mechanics 2012, Book of Extended Abstracts. First edition, 2012. Prague: Akademie věd České republiky. Ústav teoretické a aplikované mechaniky, 2012. p. 350-351. ISBN 978-80-86246-39-0.
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Original name Determination of mechanical properties from microcompression test
Name in Czech Stanovení mechanických vlastností pomocí mikrokompresního testu
Authors TRUHLÁŘ, Michal, Tomáš KRUML, Ivo KUBĚNA, Klára PETRÁČKOVÁ and Luboš NÁHLÍK.
Edition First edition, 2012. Prague, Engineering Mechanics 2012, Book of Extended Abstracts, p. 350-351, 2 pp. 2012.
Publisher Akademie věd České republiky. Ústav teoretické a aplikované mechaniky
Other information
Original language English
Type of outcome Proceedings paper
Field of Study 20306 Audio engineering, reliability analysis
Country of publisher Czech Republic
Confidentiality degree is not subject to a state or trade secret
Organization unit Faculty of Science
ISBN 978-80-86246-39-0
Keywords (in Czech) mikrokomprese; vlastnosti tenkých vrstev; fokuzovaný iontový svazek; Youngův modul; FEM
Keywords in English microcompression; thin film properties; focused ion beam; Young modulus; FEM
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Changed by Changed by: Mgr. Michal Truhlář, učo 151246. Changed: 13. 6. 2012 16:42.
Abstract
This paper describes a microcompression test of thin Al - 1.5 wt. % Cu thin film deposited on Si substrate. Microcompression combines the sample preparation with the use of ion focused beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared using FIB. The diameter of pillars was about 1.3 um and their height was about 2 um (equal to the film thickness). Stress-strain curves of the thin film were obtained. The results depend on crystallographic orientation of pillar. The paper is focused to an attempt to determine as precisely as possible Young modulus of the film using experimental data and finite element modelling.
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