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@inproceedings{984930,
author = {Truhlář, Michal and Kruml, Tomáš and Kuběna, Ivo and Petráčková, Klára and Náhlík, Luboš},
address = {Prague},
booktitle = {Engineering Mechanics 2012, Book of Extended Abstracts},
edition = {First edition, 2012},
editor = {Jiří Náprstník and Cyril Fischer},
keywords = {microcompression; thin film properties; focused ion beam; Young modulus; FEM},
language = {eng},
location = {Prague},
isbn = {978-80-86246-39-0},
pages = {350-351},
publisher = {Akademie věd České republiky. Ústav teoretické a aplikované mechaniky},
title = {Determination of mechanical properties from microcompression test},
year = {2012}
}
TY - JOUR
ID - 984930
AU - Truhlář, Michal - Kruml, Tomáš - Kuběna, Ivo - Petráčková, Klára - Náhlík, Luboš
PY - 2012
TI - Determination of mechanical properties from microcompression test
PB - Akademie věd České republiky. Ústav teoretické a aplikované mechaniky
CY - Prague
SN - 9788086246390
KW - microcompression
KW - thin film properties
KW - focused ion beam
KW - Young modulus
KW - FEM
N2 - This paper describes a microcompression test of thin Al - 1.5 wt. % Cu thin film deposited on Si substrate. Microcompression combines the sample preparation with the use of ion focused beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared using FIB. The diameter of pillars was about 1.3 um and their height was about 2 um (equal to the film thickness). Stress-strain curves of the thin film were obtained. The results depend on crystallographic orientation of pillar. The paper is focused to an attempt to determine as precisely as possible Young modulus of the film using experimental data and finite element modelling.
ER -
TRUHLÁŘ, Michal, Tomáš KRUML, Ivo KUBĚNA, Klára PETRÁČKOVÁ and Luboš NÁHLÍK. Determination of mechanical properties from microcompression test. In Jiří Náprstník and Cyril Fischer. \textit{Engineering Mechanics 2012, Book of Extended Abstracts}. First edition, 2012. Prague: Akademie věd České republiky. Ústav teoretické a aplikované mechaniky, 2012. p.~350-351. ISBN~978-80-86246-39-0.
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