FRANCLOVÁ, Jana, Zuzana KUČEROVÁ,
Vilma BURŠÍKOVÁ,
Lenka ZAJÍČKOVÁ and Vratislav PEŘINA. Structural changes of plasma deposited SiOxCyHz thin films attained by thermal annealing.
Czech. J. Phys. Praha: Institute of Physics Academy of Sciences, 2004, vol. 2004, No 54, p. C847-C852, 6 pp. ISSN 0011-4626.