Publication Records

1998

1. Diagnostics of RF Plasma During CNx Film Deposition

   ELIÁŠ, Marek and Jan JANČA. Diagnostics of RF Plasma During CNx Film Deposition. In 11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma. 1st ed. Bratislava: MFF UK, Bratislava, 1998, p. 54-57. Part 1. ISBN 80-967454-6-8.

   More: https://is.muni.cz/publication/205653/en