Masaryk University

Publication Records

česky | in English

Filter publications

    2007

    1. Plasma enhanced CVD of thin films using hexamethyldisiloxane and octamethyltetrasiloxane monomers
      ZAJÍČKOVÁ, Lenka, Zuzana KUČEROVÁ, Daniel FRANTA, Vilma BURŠÍKOVÁ, Jiří BURŠÍK, Pavel SŤAHEL and Petr KLAPETEK. Plasma enhanced CVD of thin films using hexamethyldisiloxane and octamethyltetrasiloxane monomers. In 18th International Symposium on Plasma Chemistry. Kyoto: International Plasma Chemistry Society, 2007, p. 459.
      More: https://is.muni.cz/publication/747827/en
Display details
Displayed: 12/11/2024 18:54