Publication Records

2005

1. Spatial characterization of an IPVD reactor: neutral gas temperature and interpretation of optical spectroscopy measurements

   DE POUCQUES, Ludovic, Jean-Christophe IMBERT, Caroline BOISSE-LAPORTE, Petr VAŠINA, Jean BRETAGNE, Lionel TEULÉ-GAY and Michel TOUZEAU. Spatial characterization of an IPVD reactor: neutral gas temperature and interpretation of optical spectroscopy measurements. Plasma Sources Science and Technology. Bristol: Institute of Physics Publishing, 2005, vol. 14, No 2, p. 321-327. ISSN 0963-0252.

   Name in Czech: Prostorove rozlisena charakterizace IPVD reaktoru: teplota jako klicovy parametr pro interpretaci opticke emisni spektroskopie
   Name (in English): Spatial characterization of an IPVD reactor: neutral gas temperature and interpretation of optical spectroscopy measurements
   RIV/00216224:14310/05:00012907 Article in a journal. Plasma physics and discharge through gases. English. United Kingdom of Great Britain and Northern Ireland.
   de Poucques, Ludovic (250 France) -- Imbert, Jean-Christophe (250 France) -- Boisse-Laporte, Caroline (250 France) -- Vašina, Petr (203 Czech Republic, guarantor) -- Bretagne, Jean (250 France) -- Teulé-Gay, Lionel (250 France) -- Touzeau, Michel (250 France)
   Keywords in English: physical vapor deposition; ionised physical vapor deposition; titanium; metal ionisation; density; magnetron
   Changed by: prof. Mgr. Petr Vašina, Ph.D., učo 21782. Changed: 23/2/2006 16:05.

   More: https://is.muni.cz/publication/596585/en