Masaryk University

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    2003

    1. Reduction of tungsten precursors in inductively coupled RF discharge
      JANČA, Jan, Marek ELIÁŠ and Vlastimil BROŽEK. Reduction of tungsten precursors in inductively coupled RF discharge. Pierre Fauchais. In Progress in Plasma Processing of Materials 2003. 1st. New York, 2003: Begell House, Inc. New York, U.S.A., 2003, p. 737 - 742. ISBN 1-56700-192-0.
      More: https://is.muni.cz/publication/488178/en
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