Masaryk University

Publication Records

česky | in English

Filter publications

    2008

    1. KARÁSKOVÁ, Monika, Lenka ZAJÍČKOVÁ, Vilma BURŠÍKOVÁ, Ondřej JAŠEK, Daniel FRANTA, Jiřina MATĚJKOVÁ and Petr KLAPETEK. NUCLEATION AND PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION OF ULTRANANOCRYSTALLINE DIAMOND FILMS ON DIFFERENT SUBSTRATES. In CESPC II Book Of Extended Abstracts. 1st ed. Brno: Masarykova Univerzita, 2008, p. 159-160.
    2. SOBOTA, Jaroslav, Vilma BURSIKOVA, Jan GROSSMAN, Tomas FORT, Petr KLAPETEK, Jiri BURSIK, Daniel FRANTA and Vratislav PERINA. Optimization of the performance of graded amorphous carbon coatings to steel substrates using PECVD. In 2nd conference on New Diamond and Nano Carbons 2008. 2008.
    3. KELAR, Lukáš, Vilma BURŠÍKOVÁ and Zdeněk BOCHNÍČEK. Preparation and characterisation of carbon films prepared from HMDSZ/methane/nitrogen or hydrogen mixture using PECVD. In CESPC II - Book of extended abstracts. Brno, Czech Republic: Masaryk University, Brno, 2008, p. 106-107.
    4. KELAR, Lukáš, Vilma BURŠÍKOVÁ and Zdeněk BOCHNÍČEK. Preparation and characterisation of carbon films prepared from HMDSZ/Methane/Nitrogen or Hydrogen mixture using PECVD. In 2nd Central European Symposium on Plasma Chemistry. 2008.

    2007

    1. KUČEROVÁ, Zuzana, Lenka ZAJÍČKOVÁ, Ondřej JAŠEK, Marek ELIÁŠ, Petr SYNEK, Jiřina MATĚJKOVÁ, Antonín REK and Jiří BURŠÍK. CARBON NANOTUBES SYNTHESIZED BY PLASMA ENHANCED CVD AT ATMOSPHERIC PRESSURE AND THEIR POST-DEPOSITION TREATMENT. In New Perspectives of Plasma Science and Technology CD. 1st ed. Brno: VUT Brno, 2007, 1 pp.
    2. ZAJÍČKOVÁ, Lenka, Vilma BURŠÍKOVÁ, Daniel FRANTA, Angelique BOUSQUET, Agnes GRANIER, Antoine GOULLET and Jiří BURŠÍK. Comparative Study of Films Deposited from HMDSO/O2 in Continuous Wave and Pulsed rf Discharges. Plasma processes and polymers. Weinheim: Wiley-VCH, 2007, vol. 4, S1, p. S287-S293, 7 pp. ISSN 1612-8850.
    3. ZAJÍČKOVÁ, Lenka, Vilma BURŠÍKOVÁ, Zuzana KUČEROVÁ, Daniel FRANTA, Pavel DVOŘÁK, Radek ŠMÍD, Vratislav PEŘINA and Anna MACKOVÁ. Deposition of protective coatings in rf organosilicon discharges. Plasma Sources Science and Technology. Bristol: Institute of Physics Publishing, 2007, vol. 16, No 1, p. S123-S132, 10 pp. ISSN 0963-0252.
    4. ZAJÍČKOVÁ, Lenka, Zuzana KUČEROVÁ, Daniel FRANTA, Vilma BURŠÍKOVÁ, Jiří BURŠÍK, Pavel SŤAHEL and Petr KLAPETEK. Plasma enhanced CVD of thin films using hexamethyldisiloxane and octamethyltetrasiloxane monomers. In 18th International Symposium on Plasma Chemistry. Kyoto: International Plasma Chemistry Society, 2007, p. 459.
    5. KELAR, Lukáš and Vilma BURŠÍKOVÁ. Preparation of protective coatings on polycarbonate from CH4/HMDSZ mixture using PECVD. In Juniormat 07. Brno: FMI VUT Brno, 2007, p. 39-42. ISBN 978-80-214-3459-2.
    6. GRANIER, A., T. BEGOU, C. DUQUENNE, M.A. DJOUADI, X. FENG, Vilma BURŠÍKOVÁ and Lenka ZAJÍČKOVÁ. Structure and properties of DLC/SiOx films deposited in CW and pulsed plasma. In 18th International Symposium on Plasma Chemistry, Abstracts and Full-Papers CD. Kyoto, Japan: Kyoto University, 2007, p. 1-4. ISBN 978-9903773-2-8.
    7. BURŠÍKOVÁ, Vilma, Jiří BURŠÍK, Lukáš KELAR, Daniel FRANTA, Petr KLAPETEK and Vratislav PEŘINA. Studium DLC vrstev na plastových substrátech (Study of DLC Coatings Deposited on Plastic Substrates). In VI. ročník konferencie Vrstvy a povlaky 2007. 2007th ed. Rožnov pod Radhoštěm: LISS a.s., 2007, p. 1-4. ISBN 978-80-969310-4-0.

    2006

    1. KUČEROVÁ, Zuzana, Lenka ZAJÍČKOVÁ, Marek ELIÁŠ, Ondřej JAŠEK, Richard FICEK, Radimir VRBA, František MATĚJKA, Jiřina MATĚJKOVÁ, Petr KLAPETEK and Jiří BURŠÍK. Carbon nanotubes synthesized by plasma enhanced CVD: Preparation of measurement of their electrical properties. Czechoslovak Journal of Physics. Praha: Springer Netherlands, 2006, vol. 56, Suppl 2, p. B1244, 6 pp. ISSN 0011-4626.
    2. BURŠÍKOVÁ, Vilma, Lenka ZAJÍČKOVÁ, Daniel FRANTA, Jan JANČA, Jiří BURŠÍK, Petr KLAPETEK, Olga BLÁHOVÁ, Vratislav PEŘINA and Vladislav NAVRÁTIL. Deposition and Characterisation of Nanostructured silicon-oxide Containing Diamond-like Carbon Coatings. In 7th International Balkan Workshop on Applied Physics - Abstracts. 1st ed. Constanta, Romania: Ovidius University, 2006, p. 101-102, 1 pp. ISBN 978-80-214-3460-8.
    3. JAŠEK, Ondřej, Monika KARÁSKOVÁ, Vilma BURŠÍKOVÁ, Lenka ZAJÍČKOVÁ, Daniel FRANTA, Zdeněk FRGALA, Jiřina MATĚJKOVÁ, Antonín REK, Petr KLAPETEK and Jiří BURŠÍK. Depozice nanokrystalických diamantových vrstev metodou PECVD v mikrovlnném reaktoru typu ASTEX (Nanocrystalline diamond films deposition by PECVD in ASTEX type microwave reactor). In Moderní trendy ve fyzice plazmatu a pevných látek II. 1st ed. Brno: Masarykova univerzita, 2006, p. 133-138. ISBN 80-210-4195-1.
    4. BURŠÍKOVÁ, Vilma, Lenka ZAJÍČKOVÁ, Pavel DVOŘÁK, Miroslav VALTR, Jiří BURŠÍK, Olga BLÁHOVÁ, Vratislav PEŘINA and Jan JANČA. Influence of Silicon, Oxygen and Nitrogen Upon the Properties of Plasma Deposited Amorphous Diamond-like Carbon Coatings. Journal of advanced oxidation technologies. Dundas, Ontario, Canada: Science & Technology Network, Inc., 2006, vol. 9, No 2, p. 232-237, 5 pp. ISSN 1203-8407.
    5. BURŠÍKOVÁ, Vilma, Zdeněk FRGALA, Jiří BURŠÍK, Ondřej JAŠEK, Lenka ZAJÍČKOVÁ, Monika KARÁSKOVÁ, Jiřina MATĚJKOVÁ, Antonín REK, Daniel FRANTA and Petr KLAPETEK. Mechanical properties of nanostructured composite diamond films prepared by PECVD enhanced by RF induced DC self bias. In E-MRS 2006 Fall meeting. 1st ed. Warsaw: EMRS, 2006, p. 14-14. ISBN 83-89-585-09-X.
    6. VALTR, Miroslav, Ivan OHLÍDAL and Daniel FRANTA. Optical characterization of carbon films prepared by PECVD using ellipsometry and reflectometry. Czech. J. Phys. Praha: Institute of Physics Academy of Sciences, 2006, 56/2006, Suppl. B, p. 1103 - 1109. ISSN 0011-4626.
    7. BURŠÍKOVÁ, Vilma, Pavel DVOŘÁK, Lenka ZAJÍČKOVÁ, Daniel FRANTA, Jan JANČA, Jiří BURŠÍK, O. BLÁHOVÁ, V. PEŘINA and P. KLAPETEK. Silicon-oxide Containing Diamond-like Carbon Coatings Prepared Using Plasma Enhanced Chemical Vapor Deposition. In Application of Nanocrystalline Diamond and Diamond Like Carbon Materials. Kolkata, India: Nihar Ranjan Ray, 2006, p. 311-315.
    8. BURŠÍKOVÁ, Vilma, Nihar Ranjan RAY, O. BLÁHOVÁ, J. JAŠEK, Z. FRGALA, L. ZAJÍČKOVÁ, D. FRANTA, J. BURŠÍK and P. KLAPETEK. Study od Mechanocal Properties of Diamond-like Crabon and Nanocomposite Diamond Coatings Prepared by Several Different Deposition Techniques. In Application of Nanocrystalline Diamond and Diamond Like Carbon Materials. Kolkata, India: Nihar Ranjan Ray, 2006, p. 27-37.

    2005

    1. VALTR, Miroslav, Ivan OHLÍDAL and Petr KLAPETEK. AFM Study of Hydrocarbon Thin Films. In WDS'05 Proceedings of Contributed Papers: Part II - Physics of Plasmas and Ionized Media (ed. J. Safrankova). Praha: Matfyzpress, 2005, p. 391-396. ISBN 80-86732-59-2.
    2. FRANCLOVÁ, Jana, Zuzana KUČEROVÁ and Vilma BURŠÍKOVÁ. Electrical Properties of Plasma Deposited Thin Films. 1st ed. Praha: MATFYZPRESS, 2005, 4 pp. WDS 05, Proceedings of Contributed Papers, Part II. ISBN 80-86732-59-2.
    3. BURŠÍKOVÁ, Vilma, Lenka ZAJÍČKOVÁ, Pavel DVOŘÁK, Daniel FRANTA, Vratislav PEŘINA and Jan JANČA. Influence of silicon, oxygen and nitrogen admixtures on the properies of plasma deposited amorphous diamond-like carbon coating. In International Conference ELMECO-5, Book of Abstracts. Lublin, Poland: Lublin University of Technology, 2005, p. 18. ISBN 83-89868-23-7.
    4. OHLÍDAL, Ivan, Miloslav OHLÍDAL, Daniel FRANTA, Vlastimil ČUDEK, Vilma BURŠÍKOVÁ, Petr KLAPETEK and Kateřina PÁLENÍKOVÁ. Influence of technological conditions on mechanical stresses inside diamond-like carbon films. Diamond and Related Materials. New York: Elsevier Science S.A., 2005, vol. 14, 11-12, p. 1835-1838. ISSN 0925-9635.
    5. ZAJÍČKOVÁ, Lenka. PECVD a opracování povrchu materiálů v nízkotlakých výbojích (PECVD and treatment of surfaces in low pressure discharges). 2005.
    6. ZAJÍČKOVÁ, Lenka, Vilma BURŠÍKOVÁ, Miroslav VALTR, Vratislav PEŘINA, Anna MACKOVÁ and Jana HOUDKOVÁ. Plasma enhanced CVD of hard DLC/SiOx coatings from methane and hexamethyldisiloxane. In 17th International Symposium on Plasma Chemistry. Toronto, Kanada: University of Toronto Press Inc., 2005, p. 589-590.
    7. KELAR, Lukáš, Vilma BURŠÍKOVÁ and Jarmila SAVKOVÁ. Preparation and study of protective coatings deposited on polycarbonate substrate by PECVD (Preparation and study of protective coatings deposited on polycarbonate substrate bz PECVD). In JUNIORMAT05. 1st ed. Brno: Faculty of mechanical engineering, BUT, 2005, p. 183-185, 4 pp. ISBN 80-214-2984-4.
    8. KUČEROVÁ, Zuzana, Vilma BURŠÍKOVÁ, Lenka ZAJÍČKOVÁ, Jana FRANCLOVÁ and Vratislav PEŘINA. Thermal stability of SiOxCyHz films prepared by PECVD. Chemické listy. Praha: Česká společnost chemická, 2005, vol. 99, s49-s625, p. 465-467. ISSN 0009-2770.

    2004

    1. BRZOBOHATÝ, Oto, Vilma BURŠÍKOVÁ and David TRUNEC. Mirror effect in PECVD reactor and its explanation via MC-PIC computer simulation. Czechoslovak Journal of Physics. Prague, Czech Republic: Institute of Physics, Acad. Sci. CR,, 2004, vol. 2004, No 54, p. C527-C532, 6 pp. ISSN 0011-4626.
    2. BRZOBOHATÝ, Oto, Vilma BURŠÍKOVÁ and David TRUNEC. Monte Carlo and Particle in Cell Simulation of Mirror Effect in PECVD reactor. In WDS'04 Proceedings of Contributed Papers, Part II. Prague, (Czech republic): MATFYZPRESS, 2004, p. 287-292. ISBN 80-86732-32-0.
    3. NAVRÁTIL, Zdeněk, Vilma BURŠÍKOVÁ, Pavel SŤAHEL, Martin ŠÍRA and Pavel ZVĚŘINA. On the analysis of surface free energy of DLC coatings deposited in low pressure RF discharge. Czech. J. Phys. Praha: Institute of Physics Academy of Sciences, 2004, vol. 2004, No 54, p. C877-C882, 6 pp. ISSN 0011-4626.
    4. BURŠÍKOVÁ, Vilma, Jiří BURŠÍK and Vladislav NAVRÁTIL. Study of the Fracture of Coating/Substrate Systems. J. Engineering MECHANICS. Brno, 2004, vol. 11, No 5, p. 361-366, 4 pp.

    2003

    1. ZAJÍČKOVÁ, Lenka, Vilma BURŠÍKOVÁ, Vratislav PEŘINA, Anna MACKOVÁ and Jan JANČA. Correlation between SiOx Content and Properties of DLC:SiOx Films Prepared by PECVD. Surface and Coating Technology. New York: ELSEVIER, 2003, vol. 2003, 174-175, p. 281-285. ISSN 0257-8972.
    2. VALTR, Miroslav, Lenka ZAJÍČKOVÁ and Vilma BURŠÍKOVÁ. Dependence of the Normalized Absorbance of the DLC:SiOx Thin Films on the Flow Rate of HMDSO. In JUNIORMAT 03. 1. vyd. Brno: ÚMI VUT FSI v Brně ve spolupráci s Českou společností pro nové materiály a technologie, 2003, p. 58-59. ISBN 80-214-2462-1.
    3. FRGALA, Zdeněk, Vít KUDRLE, Jan JANČA, Vilma BURŠÍKOVÁ, Petr VAŠINA, Marcel MEŠKO, Jiří BURŠÍK, M. KADLEČÍKOVÁ and Petr KLAPETEK. Diamond Growth on silicon and WC-Co by microwave plasma chemical vapor deposition. In Proceedings of contributed papers WDS'03. Praha: MFF UK, 2003, p. 341-346.
    4. FRANCLOVÁ, Jana and Vilma BURŠÍKOVÁ. Electrical conductivity of Si incorporated diamond-like carbon films deposited by PECVD. In Juniormat 2003. 1st ed. Brno: Brno University of Technology, Faculty of Mechanical Engeneering, 2003, p. 266 - 267. ISBN 80-214-2462-1.
    5. BIBINOV, Nikita, Vít KUDRLE, Lenka ZAJÍČKOVÁ, Zoltan DONKO and Klaus WIESEMANN. Film deposition in Parallel Plate RF Discharges Containing Hydrocarbons. In Proceedings of ISPC 14. Taormina: Universita di Bari, 2003, p. 806-809.
    6. BURŠÍKOVÁ, Vilma, Lenka ZAJÍČKOVÁ, Jiří BURŠÍK and Jan JANČA. Mechanical Properties of Multilayer Coatings on Polycarbonates Prepared by PECVD. In 16th International Sympozium on Plasma Chemistry. první. Bari, Italy: R. d'Agostino, P. Favia, F. Frcassi, F. Palumbo, 2003, p. 459-459.
    7. KUČEROVÁ, Zuzana, Lenka ZAJÍČKOVÁ and Vilma BURŠÍKOVÁ. Plasma enhanced CVD of organisilicon plasma polymers. In WDS 03 Proceedings of contributed papers: Part II. Physics of Plasmas and Ionized media. 1st ed. Prague: Matfyzpress, 2003, p. 330-334. ISBN 80-86732-18-5.

    2002

    1. BURŠÍKOVÁ, Vilma, Petr SLÁDEK, Pavel SŤAHEL and Lenka ZAJÍČKOVÁ. Improvement of the efficiency of the silicon solar cells by silicon incorporated diamond-like carbon antireflective coatings. Journal of Non-Crystalline Solids. Nizozemsko: Elsevier Science B.V., 2002, vol. 2002, 299-302, p. 1147-1151. ISSN 0022-3093.
    2. BURŠÍKOVÁ, Vilma, Vladislav NAVRÁTIL, Lenka ZAJÍČKOVÁ and Jan JANČA. Temperature dependence of mechanical properties of DLC/Si protective coatings prepared by PECVD. Materials Science and Engineering A. Elsevier Science, 2002, vol. 2002, No 324, p. 251-254. ISSN 0921-5093.

    2001

    1. BRZOBOHATÝ, Oto, Lenka ZAJÍČKOVÁ and Vilma BURŠÍKOVÁ. Optical Properties of Si Incorporated Diamond-like Carbon Films Deposited by RF PECVD. In JUNIORMAT 01. 1st ed. Brno: ÚMI VUT FSI v Brně ve spolupráci s Českou společností pro nové materiály a technologie, 2001, p. 144-145. ISBN 80-214-1885-0.
    2. ZAJÍČKOVÁ, Lenka, Pavel DVOŘÁK, Vilma BURŠÍKOVÁ, Vratislav PEŘINA, Anna MACKOVÁ, Vladislav NAVRÁTIL and Jan JANČA. Plasma Enhanced CVD of DLC:Si(O) Films from Methane/Hexamethyldisiloxane Feeds. In Proceedings of 15th International Symposium on Plasma Chemistry. Orleans (France): GREMI, CNRS/University of Orleans, 2001, p. 133-138.
    3. PRYČKOVÁ, Jana, Vilma BURŠÍKOVÁ, Lenka ZAJÍČKOVÁ, Pavel DVOŘÁK and Deepak Prasad SUBEDI. Stanovení povrchové energie diamantu-podobných vrstev nanášených v plazmatu vysokofrekvenčního výboje (Determination of the surface energy of diamond like coatings deposited by PECVD). In 53, ZJAZD CHEMICKÝCH SPOLOČNOSTÍ, Zborník príspevkov. Banská Bystrica: FPV Univerzita Mateja Bela v Banskej Bystrici, 2001, p. 341-342. ISBN 80-89029-23-X.
    4. PRYČKOVÁ, Jana, Deepak Prasad SUBEDI, Vilma BURŠÍKOVÁ, Lenka ZAJÍČKOVÁ and Oto BRZOBOHATÝ. Stanovení povrchové energie tenkých vrstev nanášených v plazmatu vysokofrekvenčního výboje (Determination of Surface Energy of Plasma Deposited Thin Films). In JUNIORMAT 01. 1st ed. Brno: ÚMI VUT FSI v Brně ve spolupráci s Českou společností pro nové materiály a technologie, 2001, p. 230-231. ISBN 80-214-1885-0.
    5. VALTR, Miroslav, Lenka ZAJÍČKOVÁ and Siegmar RUDAKOWSKI. Thin Films Deposited from Ar/C2H2 by Pulsed RF PECVD: Deposition Profiles in Tubular Plug-Flow Reactor. In JUNIORMAT 01. 1. vyd. Brno: ÚMI VUT FSI v Brně ve spolupráci s Českou společností pro nové materiály a technologie, 2001, p. 277-278. ISBN 80-214-1885-0.

    2000

    1. ZAJÍČKOVÁ, Lenka, Vratislav PEŘINA, Vilma BURŠÍKOVÁ, Anna MACKOVÁ and Jan JANČA. Influence of Discharge Parameters on Composition of Films Deposited by PECVD from Hexamethyldisiloxane/Oxygen Mixtures. In Abstracts of Invited Lectures and Contributed Papers, XVth Europhysics Conference on Atomic and Molecular Physics of Ionized Gases. Miskolc - Lillafüred, Hungary: European Physical Society, 2000, p. 448-449.
    2. BURŠÍKOVÁ, Vilma, Lenka ZAJÍČKOVÁ, Pavel DVOŘÁK, Deepak Prasad SUBEDI and Jan JANČA. Plasma enhanced chemical vapor deposition of silicon incorporated diamond-like carbon films. In Abstracts of Invited Lecturers and Contributed Papers ,XVth Europhysics Conference on Atomic and Molecular Physics of Ionized Gases. Miskolc - Lillafüred, Hungary: European Physical Society, 2000, p. 408-409.

    1999

    1. ZAJÍČKOVÁ, Lenka, Jan JANČA and Vratislav PERINA. Characterisation of Silicon Oxide Thin Films Deposited by Plasma Enhanced CVD from Octamethylcyclotetrasiloxane/Oxygen Feeds. Thin Solid Films. New York: Elsevier, 1999, vol. 338, No 1, p. 49-59. ISSN 0042-6090/99.
    2. ZAJÍČKOVÁ, Lenka, Vilma BURŠÍKOVÁ and Jan JANČA. Plazmochemicka depozice oteruvzdornych tenkych vrstev na plastickych materialech (Plasmachemical deposition of abrasion resistant thin films on plastics materials). Jemná mechanika a optika. Přerov: Physical Institute, ASCR, 1999, vol. 1999, 7-8, p. 231-238. ISSN 0447-6441.
    3. DVOŘÁK, Pavel, Lenka ZAJÍČKOVÁ and Vilma BURŠÍKOVÁ. Plazmová depozice ochranných vrstev na bázi uhlíku (PECVD of protection coatings containing carbon). In Materiálové vědy na prahu 3. milénia. Brno: Vysoké učení technické v Brně, FSE, UMI, 1999, p. 314-315. ISBN 80-214-1376-X.

    1998

    1. ELIÁŠ, Marek, Josef ŠŮSTEK and Jan JANČA. Characterization of Hydrogenated Carbon Nitride Films Prepared by the PECVD. In ICPP. 1st ed. Praha: Ústav fyziky plazmatu ČAV, Praha, 1998, p. 919-920.
    2. BURŠÍKOVÁ, Vilma, Lenka ZAJÍČKOVÁ and Jan JANČA. Influence of Deposition Parameters on Mechanical Properties opf SiO2-like Protective Coatings. In ICPP. 1st ed. Praha: Ústav fyziky plazmatu ČAV, Praha, 1998, p. 918-921.
    3. ZAJÍČKOVÁ, Lenka, Vilma BURŠÍKOVÁ and Jan JANČA. Influence of Substrate and Electrode Emissivity on Plasma Enhanced CVD. In Proceeding of Thin Film Nucleation Growth and Analysis. 1st ed. Bratislava, Slovakia: UK Bratislava, Slovakia, 1998, p. 40-48. ISBN 80-227-1063-6.
    4. BURŠÍKOVÁ, Vilma, Lenka ZAJÍČKOVÁ and Jan JANČA. Mechanical Properties of Thin Films Prepared by PECVD under Various Deposition Conditions. In 11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma. 1st ed. Bratislava: MFF UK, Bratislava, 1998, p. 192-195. ISBN 80-967454-6-8.
    5. ZAJÍČKOVÁ, Lenka, Vilma BURŠÍKOVÁ and Jan JANČA. Optical Characterisation of Carbon Containing Films Deposited by Plasma Enhanced CVD. In 11th Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma. 1st ed. Bratislava: MFF UK, Bratislava, 1998, p. 170-173. ISBN 80-967454-6-8.
    6. ZAJÍČKOVÁ, Lenka, Vilma BURŠÍKOVÁ and Jan JANČA. Optimization of PECVD from Standpoint of Optical Properties of Protective Coatings on Polycarbonates. In ICPP. 1st ed. Praha: Ústav fyziky plazmatu ČAV, Praha, 1998, p. 920-921.
    7. ZAJÍČKOVÁ, Lenka, Vilma BURŠÍKOVÁ and Jan JANČA. Protection Coatings for Polycarbonates based on PECVD from Organosilicon Feeds. Vacuum. 1998, vol. 50, 1-2, p. 19-21. ISSN 0042-207X.

    1996

    1. ZAJÍČKOVÁ, Lenka, Ivan OHLÍDAL and Jan JANČA. Plasma Enhanced Chemical Vapour Deposition of Thin Films from Tetraethoxysilane and Methanol: Optical Properties and XPS Analyses. Thin Solid Films. UK Oxford: Elsevier science, 1996, vol. 1996, No 280, p. 26-36. ISSN 0040-6090.
Display details
Displayed: 11/12/2024 23:29