Masarykova univerzita

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Filtrování publikací

    2009

  1. VAŠINA, Petr a Pavel DVOŘÁK. Harmonic analysis of discharge voltages as a tool to control the RF sputtering deposition process. Europhysics Letters, European Physical Society, 2009, roč. 85, č. 1, s. 15002-15006. ISSN 0295-5075.
  2. VAŠINA, Petr a Pavel DVOŘÁK. Is it possible to control degree of target poisoning during RF reactive magnetron sputtering by higher harmonic frequencies of discharge voltage? In Frontiers in Low Temperature Plasma Diagnostics 8 - Book of abstracts. Brno: VUT Brno, 2009. s. 74. ISBN 978-80-214-3875-0.
  3. SCHMIDTOVÁ, Tereza a Petr VAŠINA. Modelling of surface processes taking place during reactive magnetron sputtering deposition process with simultaneous adding of hydrogen and oxygen. In Book of Abstracts, Frontiers in Low Temperature Plasma Diagnostics 8. Brno: Brno University of Technology, 2009. s. 75-75, 1 s. ISBN 978-80-214-3875-0.
  4. 2008

  5. DVOŘÁK, Pavel a Petr VAŠINA. Harmonic analysis of discharge voltages as a tool to control RF sputtering deposition process. In 19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases - Book of Abstracts. 32 A. Granada: European Physical Society, 2008. s. 78P (topic 5), 2 s. ISBN 2-914771-04-5.
  6. DVOŘÁK, Pavel a Petr VAŠINA. Measurement of Fundamental and Higher Harmonic Frequencies as Tool to Control RF Sputtering Deposition Process. In Programme and Abstract Book of the 23rd Symposium on Plasma Physics and Technology. Praha: CVUT v Praze, 2008. s. 91-92, 1 s. ISBN 978-80-01-04030-0.
  7. VAŠINA, Petr, Marcel MEŠKO, Ludovic DE POUCQUES, Jean BRETAGNE, Caroline BOISSE-LAPORTE a Michel TOUZEAU. Study of a fast high power pulsed magnetron discharge: role of plasma deconfinement on the charged particle transport. Plasma Sources Science and Technology, Bristol: Institute of Physics Publishing, 2008, roč. 17, č. 3, s. Article number 03507. ISSN 0963-0252.
  8. 2007

  9. VAŠINA, Petr, Marcel MEŠKO, Jean-Christophe IMBERT, Mihai GANCIU, Caroline BOISSE-LAPORTE, Ludovic DE POUCQUES, Michel TOUZEAU, Daniel PAGNON a Jean BRETAGNE. Experimental study of a pre-ionized high power pulsed magnetron discharge. Plasma Sources Science and Technology, Bristol: Institute of Physics Publishing, 2007, roč. 2007, č. 16, s. 501-510. ISSN 0963-0252.
  10. 2005

  11. DE POUCQUES, Ludovic, Jean-Christophe IMBERT, Caroline BOISSE-LAPORTE, Petr VAŠINA, Jean BRETAGNE, Lionel TEULÉ-GAY a Michel TOUZEAU. Spatial characterization of an IPVD reactor: neutral gas temperature and interpretation of optical spectroscopy measurements. Plasma Sources Science and Technology, Bristol: Institute of Physics Publishing, 2005, roč. 14, č. 2, s. 321-327. ISSN 0963-0252.
  12. 2004

  13. DE POUSQUES, Ludovic, Jean-Christiphe IMBERT, Petr VAŠINA, Caroline BOISSE-LAPORTE, Lionel TEULE-GAY a Michel TOUZEAU. Comparison of the ionization efficiency of two ionized physical vapour deposition processes: magnetron discharge assisted by microwave plasma or radio-frequency plasma. In Prosseding of Ninth International Conference on Plasma Surface Engineering. Garmisch-Partenkirchen, Germany: Prosseding of Ninth International Conference on Plasma Surface Engineering, 2004. s. 23.
  14. 2003

  15. BUBLAN, Martin, Petr VAŠINA, Ludovic DE POUCQUES, Caroline BOISSE-LAPORTE, Jean-Christophe IMBERT a Michel TOUZEAU. Spatial Distribution of Species in an IPVD reactor. In WDS 03 Proceeding of Contributed Papers. Praha: MARFYZPRESS, vydavatelství Matematicko-fyzikální fakulty University Karlovy v Praze, 2003. s. 326-329, 4 s. ISBN 80-86732-18-5.
  16. 1999

  17. BEHNKE, J.F., E. PASOTH, C. CSAMBAL, Milan TICHÝ, Pavel KUDRNA, David TRUNEC a Antonín BRABLEC. A study of the electron energy distribution function in the cylindrical magnetron discharge in argon and xenon. Czech. Journal of Phys., Praha: FU AV ČR, 1999, roč. 49, č. 4, s. 483-498. ISSN 011-4626.
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