PřF:FB555 Complex plasma diagnostics - Course Information
FB555 Complex plasma diagnostics
Faculty of ScienceAutumn 2013
- Extent and Intensity
- 0/0. 1 credit(s). Type of Completion: z (credit).
- Teacher(s)
- prof. Holger Kersten, Ph.D. (lecturer)
- Guaranteed by
- prof. RNDr. Mirko Černák, CSc.
Department of Plasma Physics and Technology – Physics Section – Faculty of Science
Contact Person: doc. RNDr. Antonín Brablec, CSc.
Supplier department: Department of Plasma Physics and Technology – Physics Section – Faculty of Science - Course Enrolment Limitations
- The course is offered to students of any study field.
- Course objectives
- Students understand principles of selected subjects from plasma physics sucha as synthesis and modification of powder particles including non-convetional diagnostics methods.
- Syllabus
- Synthesis and Modification of Powder Particles in Process Plasmas
- • applications and perspectives of nano- and micro-particles
- • particle growth in reactive plasmas (silane, hydrocarbons …)
- • cluster sources and deposition
- • nano-composite materials
- • modification of particles by process plasmas (sputtering, PECVD …)
- Micro-particles as Plasma Probes
- • in front of floating walls and in front of (biased) electrodes
- • in plasma process sources (magnetron, ion beam source)
- • energy balance of particles / substrates in plasma processing
- • special (phosphor) particles for temperature measurement • force measurements
- Determination of Energy Fluxes in Process Plasmas
- • energy balance at substrate surface
- • measurement of energy fluxes / principles
- by spatial gradient;by compensation of deposited power (active thermal probe);by calorimetric probes (passive thermal probe)
- • determination of energy fluxes in process plasmas / examples
- rf plasma; ECR afterglow; magnetron sputtering of thin films (dc, dc+rf, HiPIMS; plasma downer reactor (powder treatment;ion beam source; APPJ
- Non-conventional Plasma and Sheath Diagnostics
- • motivation: ion beam source operation
- • measurement of momentum transfer
- • characteristics of the beam : ions and neutrals
- • additional effect due to momentum transfer / sputtering
- • sputter propellant instrument
- • testing the sputtering model / parametric measurements
- Literature
- recommended literature
- THORNE, Anne P., Ulf LITZÉN and Sveneric JOHANSSON. Spectrophysics : principles and applications. Berlin: Springer-Verlag, 1999, xiv, 433. ISBN 3540651179. info
- Teaching methods
- lecture
- Assessment methods
- The presence during lectures is obligatory. The subject is finished as common discussion on relevant problems.
- Language of instruction
- English
- Further Comments
- The course is taught only once.
The course is taught: in blocks.
- Enrolment Statistics (recent)
- Permalink: https://is.muni.cz/course/sci/autumn2013/FB555