FB555 Complex plasma diagnostics

Faculty of Science
Autumn 2013
Extent and Intensity
0/0. 1 credit(s). Type of Completion: z (credit).
Teacher(s)
prof. Holger Kersten, Ph.D. (lecturer)
Guaranteed by
prof. RNDr. Mirko Černák, CSc.
Department of Plasma Physics and Technology – Physics Section – Faculty of Science
Contact Person: doc. RNDr. Antonín Brablec, CSc.
Supplier department: Department of Plasma Physics and Technology – Physics Section – Faculty of Science
Course Enrolment Limitations
The course is offered to students of any study field.
Course objectives
Students understand principles of selected subjects from plasma physics sucha as synthesis and modification of powder particles including non-convetional diagnostics methods.
Syllabus
  • Synthesis and Modification of Powder Particles in Process Plasmas
  • • applications and perspectives of nano- and micro-particles
  • • particle growth in reactive plasmas (silane, hydrocarbons …)
  • • cluster sources and deposition
  • • nano-composite materials
  • • modification of particles by process plasmas (sputtering, PECVD …)
  • Micro-particles as Plasma Probes
  • • in front of floating walls and in front of (biased) electrodes
  • • in plasma process sources (magnetron, ion beam source)
  • • energy balance of particles / substrates in plasma processing
  • • special (phosphor) particles for temperature measurement • force measurements
  • Determination of Energy Fluxes in Process Plasmas
  • • energy balance at substrate surface
  • • measurement of energy fluxes / principles
  • by spatial gradient;by compensation of deposited power (active thermal probe);by calorimetric probes (passive thermal probe)
  • • determination of energy fluxes in process plasmas / examples
  • rf plasma; ECR afterglow; magnetron sputtering of thin films (dc, dc+rf, HiPIMS; plasma downer reactor (powder treatment;ion beam source; APPJ
  • Non-conventional Plasma and Sheath Diagnostics
  • • motivation: ion beam source operation
  • • measurement of momentum transfer
  • • characteristics of the beam : ions and neutrals
  • • additional effect due to momentum transfer / sputtering
  • • sputter propellant instrument
  • • testing the sputtering model / parametric measurements
Literature
    recommended literature
  • THORNE, Anne P., Ulf LITZÉN and Sveneric JOHANSSON. Spectrophysics : principles and applications. Berlin: Springer-Verlag, 1999, xiv, 433. ISBN 3540651179. info
Teaching methods
lecture
Assessment methods
The presence during lectures is obligatory. The subject is finished as common discussion on relevant problems.
Language of instruction
English
Further Comments
The course is taught only once.
The course is taught: in blocks.
  • Enrolment Statistics (recent)
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