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@proceedings{1069207,
author = {Souček, Pavel and Schmidtová, Tereza and Zábranský, Lukáš and Buršíková, Vilma and Vašina, Petr},
booktitle = {Thirteenth International Conference on Plasma Surface Engineering},
keywords = {nanocomposite; titanium; carbon; mechanical properties},
language = {eng},
title = {Properties of nc-TiC/a-C:H films prepared by PVD-PECVD process at low and high ion bombardment},
year = {2012}
}
TY - CONF
ID - 1069207
AU - Souček, Pavel - Schmidtová, Tereza - Zábranský, Lukáš - Buršíková, Vilma - Vašina, Petr
PY - 2012
TI - Properties of nc-TiC/a-C:H films prepared by PVD-PECVD process at low and high ion bombardment
KW - nanocomposite
KW - titanium
KW - carbon
KW - mechanical properties
N2 - Two sets of nc-TiC/a-C:H coatings with varying chemical composition were prepared using a hybrid PVD-PECVD deposition process combining sputtering of titanium target in argon/acetylene. The range of chemical compositions was chosen appropriately to optimize the hardness of the coatings – from 30at. % to 70 at. % Ti. The main goal of this contribution is focused on comparison of structure, chemical composition, and mechanical properties of the coatings prepared at different ion bombardment conditions. Time evolution of the deposition process is also taken into account.
ER -
SOUČEK, Pavel, Tereza SCHMIDTOVÁ, Lukáš ZÁBRANSKÝ, Vilma BURŠÍKOVÁ a Petr VAŠINA. Properties of nc-TiC/a-C:H films prepared by PVD-PECVD process at low and high ion bombardment. In \textit{Thirteenth International Conference on Plasma Surface Engineering}. 2012.
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