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@inproceedings{1069244,
author = {Klein, Peter and Vašina, Petr and Schmidtová, Tereza},
address = {Brno},
booktitle = {Potential and Applications of Surface Nanothreatment of Polymers and Glass},
keywords = {sputtering; magnetron; hysteresis},
howpublished = {tištěná verze "print"},
language = {eng},
location = {Brno},
isbn = {978-80-210-5979-5},
pages = {61-62},
publisher = {Masaryk University},
title = {Feedback system to control reactive magnetron sputtering},
year = {2012}
}
TY - JOUR
ID - 1069244
AU - Klein, Peter - Vašina, Petr - Schmidtová, Tereza
PY - 2012
TI - Feedback system to control reactive magnetron sputtering
PB - Masaryk University
CY - Brno
SN - 9788021059795
KW - sputtering
KW - magnetron
KW - hysteresis
N2 - The process of reactive magnetron sputtering of titanium with oxygen inlet was studied. Thanks to feedback system Speedflo the process was able to stabilise itself in former unstable hysteresis region. The results of the experiments in hysteresis region let to improvements in theoretical model based on Berg’s model.
ER -
KLEIN, Peter, Petr VAŠINA a Tereza SCHMIDTOVÁ. Feedback system to control reactive magnetron sputtering. In \textit{Potential and Applications of Surface Nanothreatment of Polymers and Glass}. Brno: Masaryk University, 2012, s.~61-62. ISBN~978-80-210-5979-5.
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