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@inproceedings{1070409,
author = {Obrusník, Adam and Bonaventura, Zdeněk and Potocký, Štěpán and Kromka, Alexander},
address = {Lisboa},
booktitle = {XXI Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases Proceedings},
editor = {P. G. C. Almerida, L. L. Alves, V. Guerra},
keywords = {finite element method, simulation, plasma, NCD, microwave plasma, hydrogen plasma},
language = {eng},
location = {Lisboa},
isbn = {2-914771-74-6},
publisher = {European Physical Society},
title = {Numerical simulation of large area microwave plasma system for deposition of nanocrystalline diamond films},
year = {2012}
}
TY - JOUR
ID - 1070409
AU - Obrusník, Adam - Bonaventura, Zdeněk - Potocký, Štěpán - Kromka, Alexander
PY - 2012
TI - Numerical simulation of large area microwave plasma system for deposition of nanocrystalline diamond films
PB - European Physical Society
CY - Lisboa
SN - 2914771746
KW - finite element method, simulation, plasma, NCD, microwave plasma, hydrogen plasma
ER -
OBRUSNÍK, Adam, Zdeněk BONAVENTURA, Štěpán POTOCKÝ and Alexander KROMKA. Numerical simulation of large area microwave plasma system for deposition of nanocrystalline diamond films. In P. G. C. Almerida, L. L. Alves, V. Guerra. \textit{XXI Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases Proceedings}. Lisboa: European Physical Society, 2012, 2 pp. ISBN~2-914771-74-6.
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