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@proceedings{1070433,
author = {Vašina, Petr and Schmidtová, Tereza and Souček, Pavel},
booktitle = {NANOCON 2012},
keywords = {hybrid PVD-PECVD process; nanocomposite coatings; Me/C},
language = {eng},
title = {Hybrid PVD-PECVD Process for Synthesis of Me/C Nanocomposite Coatings},
year = {2012}
}
TY - CONF
ID - 1070433
AU - Vašina, Petr - Schmidtová, Tereza - Souček, Pavel
PY - 2012
TI - Hybrid PVD-PECVD Process for Synthesis of Me/C Nanocomposite Coatings
KW - hybrid PVD-PECVD process
KW - nanocomposite coatings
KW - Me/C
N2 - Hybrid PVD-PECVD process of titanium sputtering in argon and acetylene has been used for deposition of nanocomposite material consisting of nanocrystallites of titanium carbide embedded in hydrogenated carbon matrix. nc-TiC/a-C:H layers showed promising combination of properties such as high hardness and Young’s modulus with low friction and wear making it an industrially attractive material for protective coatings and tribological applications. Hybrid PVD-PECVD process that combines aspects of both conventional techniques: sputtering of titanium target (PVD) and acetylene as a source of carbon for polymerization (PECVD) was studied. The aim of this contribution is to describe and understand elementary processes influencing the hybrid PVD-PECVD process. We report a non-monotonous evolution of cathode voltage and current, total pressure and spectral line intensities on acetylene supply flow. We propose an explanation of non-monotonous evolutions through the analysis of the target state. We correlate process characteristics and coating properties.
ER -
VAŠINA, Petr, Tereza SCHMIDTOVÁ a Pavel SOUČEK. Hybrid PVD-PECVD Process for Synthesis of Me/C Nanocomposite Coatings. In \textit{NANOCON 2012}. 2012.
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