Potential use of V-channel Ge(220) monochromators in X-ray
metrology and imaging

J 2013

Potential use of V-channel Ge(220) monochromators in X-ray metrology and imaging

KORYTÁR, D., P. VAGOVIČ, K. VÉGSÖ, P. ŠIFFALOVIČ, E. DOBROČKA et. al.

Základní údaje

Originální název

Potential use of V-channel Ge(220) monochromators in X-ray metrology and imaging

Autoři

KORYTÁR, D. (703 Slovensko), P. VAGOVIČ (703 Slovensko), K. VÉGSÖ (703 Slovensko), P. ŠIFFALOVIČ (703 Slovensko), E. DOBROČKA (703 Slovensko), W. JARK (380 Itálie), V. ÁČ (703 Slovensko), Z. ZÁPRAŽNÝ (703 Slovensko), C. FERRARI (380 Itálie), A. CECILIA (703 Slovensko), E. HAMANN (276 Německo), Petr MIKULÍK (203 Česká republika, garant, domácí), T. BAUMBACH (276 Německo), M. FIEDERLE (276 Německo) a M. JERGEL (703 Slovensko)

Vydání

Journal of Applied Crystallography, Hoboken, WILEY-BLACKWELL, 2013, 0021-8898

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10302 Condensed matter physics

Stát vydavatele

Spojené státy

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL URL

Impakt faktor

Impact factor: 3.950

Kód RIV

RIV/00216224:14740/13:00069091

Organizační jednotka

Středoevropský technologický institut

DOI

http://dx.doi.org/10.1107/S0021889813006122

UT WoS

000322032300019

Klíčová slova anglicky

x-ray optics; monochromators; imaging

Štítky

rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 6. 4. 2014 23:17, Olga Křížová

Anotace

V originále

While channel-cut crystals, in which the diffracting surfaces in an asymmetric cut are kept parallel, can provide beam collimation and spectral beam shaping, they can in addition provide beam compression or expansion if the cut is V-shaped. The compression/expansion ratio depends in this case on the total asymmetry factor. If the Ge(220) diffraction planes and a total asymmetry factor in excess of 10 are used, the rocking curves of two diffractors will have a sufficient overlap only if the second diffractor is tuned slightly with respect to the first one. This study compares and analyses several ways of overcoming this mismatch, which is due to refraction, when the Cu K1 beam is compressed 21-fold in a V21 monochromator. A more than sixfold intensity increase was obtained if the matching was improved either by a compositional variation or by a thermal deformation. This provided an intensity gain compared with the use of a simple slit in a symmetrical channel-cut monochromator. The first attempt to overcome the mismatch by introducing different types of X-ray prisms for the required beam deflection is described as well. The performance of the V-shaped monochromators is demonstrated in two applications. A narrow collimated monochromatic beam obtained in the beam compressing mode was used for high-resolution grazing-incidence small-angle X-ray scattering measurements of a silicon sample with corrupted surface. In addition, a two-dimensional Bragg magnifier, based on two crossed V15 channel monochromators in beam expansion mode and tuned by means of unequal asymmetries, was successfully applied to high-resolution imaging of test structures in combination with a Medipix detector.

Návaznosti

ED1.1.00/02.0068, projekt VaV

Název: CEITEC - central european institute of technology

Citovat

KORYTÁR, D., P. VAGOVIČ, K. VÉGSÖ, P. ŠIFFALOVIČ, E. DOBROČKA, W. JARK, V. ÁČ, Z. ZÁPRAŽNÝ, C. FERRARI, A. CECILIA, E. HAMANN, Petr MIKULÍK, T. BAUMBACH, M. FIEDERLE a M. JERGEL. Potential use of V-channel Ge(220) monochromators in X-ray metrology and imaging. Journal of Applied Crystallography. Hoboken: WILEY-BLACKWELL, 2013, roč. 46, č. 4, s. 945-952. ISSN 0021-8898. Dostupné z: https://dx.doi.org/10.1107/S0021889813006122.

@article{1120392,
   author = {Korytár, D. and Vagovič, P. and Végsö, K. and Šiffalovič, P. and Dobročka, E. and Jark, W. and Áč, V. and Zápražný, Z. and Ferrari, C. and Cecilia, A. and Hamann, E. and Mikulík, Petr and Baumbach, T. and Fiederle, M. and Jergel, M.},
   article_location = {Hoboken},
   article_number = {4},
   doi = {http://dx.doi.org/10.1107/S0021889813006122},
   keywords = {x-ray optics; monochromators; imaging},
   language = {eng},
   issn = {0021-8898},
   journal = {Journal of Applied Crystallography},
   title = {Potential use of V-channel Ge(220) monochromators in X-ray metrology and imaging},
   url = {http://scripts.iucr.org/cgi-bin/paper?xk5006},
   volume = {46},
   year = {2013}
}

TY  - JOUR
ID  - 1120392
AU  - Korytár, D. - Vagovič, P. - Végsö, K. - Šiffalovič, P. - Dobročka, E. - Jark, W. - Áč, V. - Zápražný, Z. - Ferrari, C. - Cecilia, A. - Hamann, E. - Mikulík, Petr - Baumbach, T. - Fiederle, M. - Jergel, M.
PY  - 2013
TI  - Potential use of V-channel Ge(220) monochromators in X-ray metrology and imaging
JF  - Journal of Applied Crystallography
VL  - 46
IS  - 4
SP  - 945-952
EP  - 945-952
PB  - WILEY-BLACKWELL
SN  - 00218898
KW  - x-ray optics
KW  - monochromators
KW  - imaging
UR  - http://scripts.iucr.org/cgi-bin/paper?xk5006
N2  - While channel-cut crystals, in which the diffracting surfaces in an asymmetric cut are kept parallel, can provide beam collimation and spectral beam shaping, they can in addition provide beam compression or expansion if the cut is V-shaped. The compression/expansion ratio depends in this case on the total asymmetry factor. If the Ge(220) diffraction planes and a total asymmetry factor in excess of 10 are used, the rocking curves of two diffractors will have a sufficient overlap only if the second diffractor is tuned slightly with respect to the first one. This study compares and analyses several ways of overcoming this mismatch, which is due to refraction, when the Cu K1 beam is compressed 21-fold in a V21 monochromator. A more than sixfold intensity increase was obtained if the matching was improved either by a compositional variation or by a thermal deformation. This provided an intensity gain compared with the use of a simple slit in a symmetrical channel-cut monochromator. The first attempt to overcome the mismatch by introducing different types of X-ray prisms for the required beam deflection is described as well. The performance of the V-shaped monochromators is demonstrated in two applications. A narrow collimated monochromatic beam obtained in the beam compressing mode was used for high-resolution grazing-incidence small-angle X-ray scattering measurements of a silicon sample with corrupted surface. In addition, a two-dimensional Bragg magnifier, based on two crossed V15 channel monochromators in beam expansion mode and tuned by means of unequal asymmetries, was successfully applied to high-resolution imaging of test structures in combination with a Medipix detector.
ER  -

KORYTÁR, D., P. VAGOVIČ, K. VÉGSÖ, P. ŠIFFALOVIČ, E. DOBROČKA, W. JARK, V. ÁČ, Z. ZÁPRAŽNÝ, C. FERRARI, A. CECILIA, E. HAMANN, Petr MIKULÍK, T. BAUMBACH, M. FIEDERLE a M. JERGEL. Potential use of V-channel Ge(220) monochromators in X-ray metrology and imaging. \textit{Journal of Applied Crystallography}. Hoboken: WILEY-BLACKWELL, 2013, roč.~46, č.~4, s.~945-952. ISSN~0021-8898. Dostupné z: https://dx.doi.org/10.1107/S0021889813006122.

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